IP Library › Granted Patent US 6,701,202
Granted Patent Utility
US 6,701,202 · Confirmation No. 2817

PERFORMANCE EVALUATION METHOD FOR PLASMA PROCESSING APPARATUS

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2005-08-08 COCOUT Certificate of Correction - Post Issue Communication 1 View
2004-01-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-01-02 OATH Oath or Declaration filed 1 View
2001-11-02 TRNA Transmittal of New Application 2 View
2001-11-02 SPEC Specification 171 View
2001-11-02 CLM Claims 30 View
2001-11-02 ABST Abstract 1 View
2001-11-02 DRW Drawings-only black and white line drawings 33 View
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Quick Facts
Patent No.
US 6,701,202
App. No.
10/033,443
Filed
2001-11-02
Granted
2004-03-02
Pub. No.
US20020157608A1
Art Unit
2125
PTA
0 days