Patent Assignment
Reel/Frame 012864/0666
Assignment of Assignor's Interest
Recorded: 2002-05-02
Received: 2002-05-09
Pages: 3
Assignees
ALPS ELECTRIC CO., LTD.
1-7 YUKIGAYA, OTSUKA-CHO, OTA-KU, TOKYO, JPX, JAPAN
OHMI, TADAHIRO
AOBA-KU, SENDAL-SHI, 2-1-17-301 KOMEGAFUKURO, MIYAGI-KEN, JPX, JAPAN
Covered Property
(1)
Performance Evaluation Method for Plasma Processing Apparatus
Application:
10/033,443 →