Patent Assignment
Reel/Frame 012450/0472
Assignment of Assignor's Interest
Recorded: 2002-03-06
Pages: 3
Assignor
GRUMBINE, STEVEN K.
Executed: 2002-01-11
Assignee
CABOT MICROELECTRONICS CORPORATION
870 NORTH COMMONS DRIVE, AURORA, ILLINOIS, 60504
Covered Property
(1)
Catalyst/oxidizer-based CMP system for organic polymer films
Application:
10/044,376 →