IP Library › Patent Application 10044376
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App. No. 10/044,376 · Confirmation No. 8269

Catalyst/oxidizer-based CMP system for organic polymer films

Inventor: Steven K. Grumbine
Expressly Abandoned -- During Examination
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 Code Description Pages PDF
2002-01-11 TRNA Transmittal of New Application 2 View
2002-01-11 ADS Application Data Sheet 3 View
2002-01-11 SPEC Specification 7 View
2002-01-11 CLM Claims 3 View
2002-01-11 ABST Abstract 1 View
2002-01-11 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/044,376
Filed
2002-01-11
Art Unit
3723