IP Library › Granted Patent US 6,830,503
Granted Patent Utility
US 6,830,503 · Confirmation No. 3121

CATALYST/OXIDIZER-BASED CMP SYSTEM FOR ORGANIC POLYMER FILMS

Inventor: Steven K. Grumbine
Patented Case View Patent ↗
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 Code Description Pages PDF
2004-09-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-09-15 LET. Miscellaneous Incoming Letter 1 View
2004-06-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-23 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-06-23 1449 List of References cited by applicant and considered by examiner 1 View
2004-06-23 892 List of references cited by examiner 1 View
2004-06-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-23 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-21 SRNT Examiner's search strategy and results 1 View
2003-02-18 TRNA Transmittal of New Application 4 View
2003-02-18 SPEC Specification 7 View
2003-02-18 CLM Claims 3 View
2003-02-18 ABST Abstract 1 View
2003-02-18 OATH Oath or Declaration filed 4 View
2003-02-18 WFEE Fee Worksheet (SB06) 1 View
2003-02-18 WFEE Fee Worksheet (SB06) 1 View
2003-02-18 WCLM Claims Worksheet (PTO-2022) 1 View
2003-02-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
Patent No.
US 6,830,503
App. No.
10/368,275
Filed
2003-02-18
Granted
2004-12-14
Art Unit
3723
PTA
0 days