IP Library Assignment 027727/0275
Patent Assignment
Reel/Frame 027727/0275

Notice of Security Interest in Patents

Recorded: 2012-02-16 Pages: 51
Assignor
CABOT MICROELECTRONICS CORPORATION
Executed: 2012-02-13
Assignee
BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
135 S. LASALLE STREET, IL4-135-05-41, CHICAGO, ILLINOIS, 60603
Covered Properties (247)
Negative poisson's ratio material-containing CMP polishing pad
Application: 10/754,390 →
Publication: US 2005/0153634
Abrasive-free polishing system
Application: 11/205,428 →
Publication: US 2007/0039926
Composition and method to polish silicon nitride
Application: 11/374,238 →
Publication: US 2007/0209287
Iodate-Containing Chemical-Mechanical Polishing Compositions and Methods
Patent: 8,551,202 →
Application: 11/387,558 →
Publication: US 2007/0224919
Compositions and methods for polishing silicon nitride materials
Patent: 8,759,216 →
Application: 11/448,205 →
Publication: US 2007/0298612
Silicon oxide polishing method utilizing colloidal silica
Application: 11/478,004 →
Publication: US 2008/0220610
Rate-enhanced CMP compositions for dielectric films
Application: 11/491,612 →
Publication: US 2008/0020680
Onium-containing CMP compositions and methods of use thereof
Patent: 9,129,907 →
Application: 11/517,909 →
Publication: US 2008/0060278
CMP of copper/ruthenium/tantalum substrates
Application: 11/591,730 →
Publication: US 2008/0105652
Compositions for Polishing Aluminum/Copper and Titanium in Damascene Structures
Patent: 9,343,330 →
Application: 11/634,576 →
Publication: US 2008/0134585
Compositions and methods for CMP of indium tin oxide surfaces
Application: 11/706,929 →
Publication: US 2007/0190789
Method of Polishing a Tungsten Carbide Surface
Patent: 8,162,723 →
Application: 12/224,902 →
Publication: US 2009/0103993
Compositions and Methods for Cmp of Semiconductor Materials
Application: 12/226,394 →
Publication: US 2009/0156006
CMP compositions containing a soluble peroxometalate complex and methods of use thereof
Patent: 8,541,310 →
Application: 11/800,188 →
Publication: US 2008/0274619
CMP method for metal-containing substrates
Patent: 9,074,118 →
Application: 12/309,212 →
Publication: US 2009/0314744
Chemical Mechanical Polishing Slurry, Its Preparation Method, and Use for the Same
Patent: 8,167,684 →
Application: 11/892,720 →
Publication: US 2008/0096470
Copper CMP composition containing ionic polyelectrolyte and method
Application: 11/895,896 →
Publication: US 2009/0056231
Glass polishing compositions and methods
Application: 12/311,717 →
Publication: US 2010/0022171
Compositions and Methods for Ruthenium and Tantalum Barrier Cmp
Application: 11/937,804 →
Publication: US 2009/0124173
Methods for Polishing Aluminum Nitride
Application: 12/312,477 →
Publication: US 2010/0062601
Halide Anions for Metal Removal Rate Control
Patent: 8,591,763 →
Application: 11/960,135 →
Publication: US 2008/0096390
Composition and method for enhancing pot life of hydrogen peroxide-containing CMP slurries
Application: 12/011,435 →
Publication: US 2008/0132071
Polishing Slurry for Aluminum and Aluminum Alloys
Patent: 8,251,777 →
Application: 12/069,495 →
Publication: US 2008/0200098
Compositions for Polishing Aluminum/Copper and Titanium in Damascene Structures
Patent: 8,425,797 →
Application: 12/052,970 →
Publication: US 2009/0236559
Method of Polishing Nickel-Phosphorous
Patent: 8,247,326 →
Application: 12/170,954 →
Publication: US 2010/0009537
Compositions and Methods for Chemical-Mechanical Polishing of Phase Change Materials
Application: 12/670,495 →
Publication: US 2010/0190339
Methods and Compositions for Polishing Silicon-Containing Substrates
Patent: 8,247,327 →
Application: 12/221,023 →
Publication: US 2010/0029181
Polishing Pad
Application: 12/673,057 →
Publication: US 2011/0183579
Cmp Sensor and Control System
Patent: 8,460,507 →
Application: 12/676,418 →
Publication: US 2010/0187200
Polishing Composition and Method Utilizing Abrasive Particles Treated with an Aminosilane
Patent: 9,028,572 →
Application: 12/234,237 →
Publication: US 2009/0081927
Method of Polishing a Silicon-Containing Dielectric
Patent: 8,486,169 →
Application: 12/239,249 →
Publication: US 2009/0029633
Slurry Composition Containing Non-Ionic Polymer and Method for Use
Patent: 8,157,876 →
Application: 12/317,254 →
Publication: US 2009/0126713
Polishing Composition for Nickel-Phosphorous Memory Disks
Patent: 8,226,841 →
Application: 12/364,937 →
Publication: US 2010/0193470
CMP method for improved oxide removal rate
Application: 12/384,161 →
Publication: US 2009/0191710
Polishing Composition and Method for High Silicon Nitride to Silicon Oxide Removal Rate Ratios
Patent: 8,138,091 →
Application: 12/384,266 →
Publication: US 2009/0215271
Polishing Silicon Carbide
Patent: 8,247,328 →
Application: 12/387,506 →
Publication: US 2010/0279506
Wire Saw Slurry Recycling Process
Patent: 8,425,639 →
Application: 12/476,073 →
Publication: US 2009/0293369
Polishing composition for nickel-phosphorous memory disks
Patent: 9,330,703 →
Application: 12/455,631 →
Publication: US 2010/0308016
Polishing Composition Containing Polyether Amine
Patent: 8,741,009 →
Application: 12/462,067 →
Publication: US 2009/0289033
Barrier Slurry for Low-K Dielectrics
Patent: 8,252,687 →
Application: 12/584,343 →
Publication: US 2010/0075502
Composition and Method for Polishing Bulk Silicon
Patent: 8,883,034 →
Application: 12/462,638 →
Publication: US 2011/0062376
Method to Selectively Polish Silicon Carbide Films
Patent: 9,548,211 →
Application: 12/630,288 →
Publication: US 2010/0144149
Methods and Apparatus for Chemical-Mechanical Polishing Utilizing Low Suspended Solids Polishing Compositions
Application: 12/631,977 →
Publication: US 2010/0144245
Wiresaw Apparatus and Method for Continuous Removal of Magnetic Impurities During Wiresaw Cutting
Patent: 8,636,560 →
Application: 13/133,784 →
Publication: US 2011/0240001
Composition for Improving Dryness During Wire Sawing
Patent: 8,597,538 →
Application: 13/133,857 →
Publication: US 2011/0239836
Wiresaw Cutting Method
Patent: 8,960,177 →
Application: 13/139,017 →
Publication: US 2011/0303210
Cutting Fluid Composition for Wiresawing
Application: 13/139,046 →
Publication: US 2011/0240002
Self-Cleaning Wiresaw Apparatus and Method
Patent: 8,851,059 →
Application: 13/258,112 →
Publication: US 2012/0006312
Cmp Porous Pad with Particles in a Polymeric Matrix
Patent: 9,951,054 →
Application: 12/761,016 →
Publication: US 2010/0273399
Composition and Method for Polishing Bulk Silicon
Patent: 8,815,110 →
Application: 12/762,180 →
Publication: US 2011/0062115
Oxidation-Stabilized Cmp Compositions and Methods
Patent: 8,497,209 →
Application: 12/764,268 →
Publication: US 2010/0200802
Cmp Compositions and Methods for Suppressing Polysilicon Removal Rates
Patent: 8,691,695 →
Application: 13/379,911 →
Publication: US 2012/0094489
Grooved Cmp Polishing Pad
Application: 12/837,705 →
Publication: US 2011/0014858
Cmp System Utilizing Halogen Adduct
Application: 12/838,813 →
Publication: US 2010/0276392
Compositions for Cmp of Semiconductor Materials
Patent: 8,529,680 →
Application: 12/854,470 →
Publication: US 2010/0314576
Silicon Polishing Compositions with High Rate and Low Defectivity
Patent: 8,273,142 →
Application: 12/807,324 →
Publication: US 2012/0058642
Metal Cations for Initiating Polishing
Patent: 8,637,404 →
Application: 12/952,242 →
Publication: US 2011/0065364
Composition and Method for Polishing Polysilicon
Patent: 8,697,576 →
Application: 12/971,714 →
Publication: US 2011/0136344
Metal-Passivating Cmp Compositions and Methods
Patent: 8,435,421 →
Application: 13/004,113 →
Publication: US 2011/0100956
Silicon Polishing Compositions with Improved Psd Performance
Patent: 9,425,037 →
Application: 13/351,339 →
Publication: US 2012/0190199
Compositions and Methods for Selective Polishing of Silicon Nitride Materials
Patent: 8,808,573 →
Application: 13/087,857 →
Publication: US 2012/0264304
Dilutable Cmp Composition Containing a Surfactant
Application: 13/167,467 →
Publication: US 2011/0247996
Cmp Slurry Recycling System and Methods
Application: 13/210,875 →
Publication: US 2012/0042575
Composition and Method for Polishing Aluminum Semiconductor Substrates
Patent: 8,623,766 →
Application: 13/237,881 →
Publication: US 2013/0072021
Method of Chemical-Mechanical Polishing an Electronic Component Substrate and Polishing Slurry Therefor
Patent: 4,954,142 →
Application: 07/285,435 →
Chemical Mechanical Polishing Slurry for Mental Layers
Patent: 5,527,423 →
Application: 08/319,213 →
Chemical Mechanical Polishing Slurry for Metal Layers and Films
Patent: 5,858,813 →
Application: 08/644,509 →
Multi-Oxidizer Slurry for Chemical Mechanical Polishing
Patent: 5,783,489 →
Application: 08/718,937 →
Composition and Slurry Useful for Metal Cmp
Patent: 5,958,288 →
Application: 08/753,482 →
Chemical Mechanical Polishing Slurry Useful for Copper Substrates
Patent: 5,954,997 →
Application: 08/763,705 →
Composition for Oxide Cmp
Patent: 5,759,917 →
Application: 08/774,488 →
Multi-Oxidizer Slurry for Chemical Mechanical Polishing
Patent: 6,033,596 →
Application: 08/800,562 →
Composition and Slurry Useful for Metal Cmp
Patent: 5,980,775 →
Application: 08/827,918 →
Composition and Method for Polishing Rigid Disks
Patent: 6,015,506 →
Application: 08/844,195 →
Composition and Slurry Useful for Metal Cmp
Patent: 6,068,787 →
Application: 08/891,468 →
Chemical Mechanical Polishing Slurry Useful for Copper Substrates
Patent: 6,126,853 →
Application: 08/891,649 →
Polishing Composition Including an Inhibitor of Tungsten Etching
Patent: 6,083,419 →
Application: 08/901,803 →
Chemical Mechanical Polishing Slurry Useful for Copper Substrates
Patent: 6,309,560 →
Application: 08/944,036 →
Composition for Oxide Cmp
Patent: 6,689,692 →
Application: 08/994,894 →
Chemical Mechanical Polishing Slurry for Tungsten
Patent: 6,284,151 →
Application: 08/997,289 →
Chemical Mechanical Polishing Slurry and Method for Polishing Metal/-Oxide Layers
Patent: 6,294,105 →
Application: 08/997,290 →
Chemical Mechanical Polishing Slurry Useful for Copper Substrates
Patent: 6,432,828 →
Application: 09/040,630 →
Publication: US 2001/0049910
Polishing Pad for a Semiconductor Substrate
Patent: 6,062,968 →
Application: 09/062,327 →
Cmp Slurry Containing a Solid Catalyst
Patent: 6,177,026 →
Application: 09/084,630 →
Polishing Composition Including an Inhibitor of Tungsten Etching
Patent: 6,136,711 →
Application: 09/086,659 →
Chemical Mechanical Polishing Slurry and Method for Using Same
Patent: 6,533,832 →
Application: 09/105,060 →
Publication: US 2002/0032987
Chemical Mechanical Polishing Slurry Useful for Copper/Tantalum Substrates
Patent: 6,217,416 →
Application: 09/105,065 →
Chemical Mechanical Polishing Slurry Useful for Copper/Tantalum Substrate
Patent: 6,063,306 →
Application: 09/105,555 →
Dual-Valent Rare Earth Additives to Polishing Slurries
Patent: 6,238,469 →
Application: 09/226,191 →
Chemical-Mechanical Planarization of Barriers or Liners for Copper Metallurgy
Patent: 6,375,693 →
Application: 09/307,123 →
Chemical Mechanical Polishing Method Useful for Copper Substrates
Patent: 6,593,239 →
Application: 09/366,588 →
Publication: US 2002/0033382
Cleaning Solution for Semiconductor Surfaces Following Chemical-Mechanical Polishing
Patent: 6,395,693 →
Application: 09/405,249 →
Chemical-Mechanical Planarization of Metallurgy
Patent: 6,632,377 →
Application: 09/409,798 →
Composition and Method for Polishing Rigid Disks
Patent: 6,347,978 →
Application: 09/425,473 →
Use of Csoh in a Dielectric Cmp Slurry
Patent: 6,350,393 →
Application: 09/428,965 →
Publication: US 2001/0051433
Composition and Method for Planarizing Surfaces
Patent: 6,293,848 →
Application: 09/440,401 →
Composition and Method for Planarizing Surfaces
Patent: 6,319,096 →
Application: 09/440,525 →
Slurry for Mechanical Polishing (Cmp) of Metals and Use Thereof
Patent: 6,348,076 →
Application: 09/472,961 →
Method for Polishing a Substrate Using a CMP Slurry
Patent: 6,362,104 →
Application: 09/501,221 →
Method of polishing using multi-oxidizer slurry
Patent: 6,316,366 →
Application: 09/503,996 →
Method for Polishing a Memory or Rigid Disk with an Amino Acid-Containing Composition
Patent: 6,471,884 →
Application: 09/542,774 →
Polishing Slurries for Copper and Associated Materials
Patent: 6,409,781 →
Application: 09/562,298 →
Method for Polishing a Memory or Rigid Disk with a Phosphate Ion-Containing Polishing System
Patent: 6,976,905 →
Application: 09/595,227 →
Silane Containing Polishing Composition for Cmp
Patent: 6,646,348 →
Application: 09/609,480 →
Polishing Composition for Metal Cmp
Patent: 6,592,776 →
Application: 09/609,882 →
Cmp Composition Containing Silane Modified Abrasive Particles
Patent: 6,582,623 →
Application: 09/609,884 →
Composition and Method for Planarizing Surfaces
Patent: 6,527,817 →
Application: 09/625,142 →
Polishing System with Stopping Compound and Method of Its Use
Patent: 6,855,266 →
Application: 09/636,246 →
Method for Polishing a Memory or Rigid Disk with an Oxidized Halide-Containing Polishing System
Patent: 6,468,137 →
Application: 09/656,665 →
Chemical mechanical polishing method useful for copper substrates
Patent: 6,362,106 →
Application: 09/660,847 →
Method of Polishing a Memory or Rigid Disk with an Ammonia- and/or Halide-Containing Composition
Patent: 6,461,227 →
Application: 09/690,585 →
Chemical-mechanical polishing method
Patent: 6,316,365 →
Application: 09/728,779 →
Method of Polishing or Planarizing a Substrate
Patent: 6,872,328 →
Application: 09/737,905 →
Publication: US 2002/0076932
Cmp Polishing Pad Including a Solid Catalyst
Patent: 6,435,947 →
Application: 09/766,750 →
Publication: US 2001/0036804
Catalytic Reactive Pad for Metal Cmp
Patent: 6,383,065 →
Application: 09/766,759 →
Polishing Disk with End-Point Detection Port
Patent: 6,623,331 →
Application: 09/788,082 →
Publication: US 2002/0115379
Chemical Mechanical Polishing Slurry Useful for Copper/Tantalum Substrates
Patent: 6,447,371 →
Application: 09/800,009 →
Publication: US 2001/0041507
Rare Earth Salt/Oxidizer-Based Cmp Method
Patent: 6,589,100 →
Application: 09/961,934 →
Publication: US 2003/0060135
Polishing Pad Comprising a Filled Translucent Region
Patent: 6,537,134 →
Application: 09/682,662 →
Publication: US 2002/0049033
Phosphono Compound-Containing Polishing Composition and Method of Using Same
Patent: 6,805,812 →
Application: 09/975,335 →
Publication: US 2003/0134575
Boron-Containing Polishing System and Method
Patent: 6,705,926 →
Application: 10/033,152 →
Publication: US 2003/0077985
Polishing Pad Comprising Particles with a Solid Core and Polymeric Shell
Patent: 6,685,540 →
Application: 09/995,025 →
Publication: US 2003/0100244
Polishing Slurries for Copper and Associated Materials
Patent: 6,527,819 →
Application: 10/022,308 →
Publication: US 2002/0124474
Polishing Slurries for Copper and Associated Materials
Patent: 6,936,542 →
Application: 10/022,317 →
Publication: US 2002/0081865
Alkali Metal-Containing Polishing System and Method
Patent: 6,612,911 →
Application: 10/044,174 →
Publication: US 2003/0082998
Cmp Systems and Methods Utilizing Amine-Containing Polymers
Patent: 7,004,819 →
Application: 10/051,241 →
Publication: US 2003/0139116
Cmp Method for Noble Metals
Patent: 6,527,622 →
Application: 10/054,059 →
Anionic Abrasive Particles Treated with Positively Charged Polyelectrolytes for Cmp
Patent: 6,776,810 →
Application: 10/073,844 →
Method for Manufacturing a Polishing Pad Having a Compressed Translucent Region
Patent: 6,840,843 →
Application: 10/083,985 →
Publication: US 2002/0123300
Methanol-Containing Silica-Based Cmp Compositions
Patent: 6,682,575 →
Application: 10/092,406 →
Publication: US 2003/0168628
Chemical Mechanical Polishing Slurry Useful for Copper Substrates
Patent: 6,569,350 →
Application: 10/099,492 →
Publication: US 2002/0145127
Process for Fabricating Optical Switches
Patent: 6,853,474 →
Application: 10/117,554 →
Publication: US 2003/0189025
Method of Reducing in-Trench Smearing During Polishing
Patent: 6,841,479 →
Application: 10/119,862 →
Publication: US 2002/0151177
Compositions and Methods for Dielectric Cmp
Patent: 7,677,956 →
Application: 10/142,681 →
Publication: US 2003/0211815
Chemical Mechanical Polishing Slurry Useful for Copper Substrates
Patent: 6,620,037 →
Application: 10/145,357 →
Publication: US 2002/0168923
Cleaning Solution for Semiconductor Surfaces Following Chemical-Mechanical Polishing
Patent: 6,541,434 →
Application: 10/154,231 →
Publication: US 2002/0169088
Metal Oxide Coated Carbon Black for Cmp
Patent: 7,087,187 →
Application: 10/164,916 →
Publication: US 2003/0226998
Cmp Compositions Containing Iodine and an Iodine Vapor-Trapping Agent
Patent: 6,641,630 →
Application: 10/165,133 →
Cmp Compositions for Low-K Dielectric Materials
Patent: 6,974,777 →
Application: 10/165,100 →
Publication: US 2003/0228762
Method and Apparatus for Providing a Miniature, Flexible Voltage Upconverter
Patent: 6,925,150 →
Application: 10/190,360 →
Publication: US 2004/0005030
Global Planarization Method
Patent: 6,884,729 →
Application: 10/193,589 →
Publication: US 2003/0151020
Method of Polishing a Substrate with a Polishing System Containing Conducting Polymer
Patent: 7,021,993 →
Application: 10/198,841 →
Publication: US 2004/0014398
Polishing Composition Containing Conducting Polymer
Patent: 6,811,474 →
Application: 10/199,704 →
Publication: US 2004/0014400
Slurry for Mechanical Polishing (Cmp) of Metals and Use Thereof
Patent: 6,812,193 →
Application: 10/231,047 →
Publication: US 2003/0073593
Method for Copper Cmp Using Polymeric Complexing Agents
Patent: 6,821,897 →
Application: 10/246,280 →
Publication: US 2003/0124959
Cmp Method Utilizing Amphiphilic Nonionic Surfactants
Patent: 6,936,543 →
Application: 10/269,864 →
Publication: US 2003/0228763
Microporous Polishing Pads
Patent: 6,913,517 →
Application: 10/281,782 →
Publication: US 2003/0220061
Transparent Microporous Materials for Cmp
Patent: 7,435,165 →
Application: 10/282,489 →
Publication: US 2004/0082276
Polishing Compositions and Use Thereof
Patent: 6,641,632 →
Application: 10/295,836 →
Polishing Composition Storage Container
Patent: 7,093,722 →
Application: 10/300,196 →
Publication: US 2004/0094489
Chemical Mechanical Polishing Systems and Methods for Their Use
Patent: 6,840,971 →
Application: 10/324,634 →
Publication: US 2003/0166337
Method of Polishing a Multi-Layer Substrate
Patent: 6,867,140 →
Application: 10/353,512 →
Publication: US 2003/0153184
Method of Using a Polishing System
Patent: 6,852,632 →
Application: 10/353,542 →
Publication: US 2003/0170991
Method of Polishing a Silicon-Containing Dielectric
Patent: 7,071,105 →
Application: 10/356,970 →
Publication: US 2004/0152309
Cmp Pad with Composite Transparent Window
Patent: 6,960,120 →
Application: 10/361,520 →
Publication: US 2004/0157533
Cmp Pad with Composite Transparent Window
Patent: 6,832,947 →
Application: 10/361,720 →
Publication: US 2004/0157534
Mixed-Abrasive Polishing Composition and Method for Using the Same
Patent: 6,896,591 →
Application: 10/364,243 →
Publication: US 2004/0157535
Catalyst/Oxidizer-Based Cmp System for Organic Polymer Films
Patent: 6,830,503 →
Application: 10/368,275 →
Cmp Method for Noble Metals
Patent: 7,097,541 →
Application: 10/376,172 →
Publication: US 2003/0181142
Method of Polishing a Lanthanide Substrate
Patent: 6,953,532 →
Application: 10/382,370 →
Publication: US 2004/0175949
Coated Metal Oxide Particles for Cmp
Patent: 7,044,836 →
Application: 10/419,580 →
Publication: US 2004/0209555
Polishing Composition for Metal Cmp
Patent: 6,767,476 →
Application: 10/419,659 →
Publication: US 2003/0203635
Multi-Layer Polishing Pad Material for Cmp
Patent: 6,884,156 →
Application: 10/463,680 →
Publication: US 2004/0259484
Ultrasonic Welding Method for the Manufacture of a Polishing Pad Comprising an Optically Transmissive Region
Patent: 6,997,777 →
Application: 10/463,721 →
Publication: US 2004/0259483
Polishing Pad with Oriented Pore Structure
Patent: 6,998,166 →
Application: 10/463,730 →
Publication: US 2004/0258882
Cmp of Noble Metals
Patent: 7,160,807 →
Application: 10/610,407 →
Publication: US 2004/0266196
Chemical Mechanical Polishing Slurry Useful for Copper Substrates
Patent: 7,381,648 →
Application: 10/616,335 →
Publication: US 2004/0009671
Chemical-Mechanical Polishing Composition and Method for Using the Same
Patent: 7,485,241 →
Application: 10/660,379 →
Publication: US 2005/0056368
System for the Preferential Removal of Silicon Oxide
Patent: 7,238,618 →
Application: 10/660,687 →
Publication: US 2005/0072524
Polishing Pad with Recessed Window
Patent: 7,195,539 →
Application: 10/666,797 →
Publication: US 2005/0060943
Method of Forming a Current Controlling Device
Patent: 6,929,983 →
Application: 10/675,417 →
Publication: US 2005/0067612
Mem Switching Device
Patent: 7,317,232 →
Application: 10/689,167 →
Publication: US 2005/0040484
Compositions for Oxide Cmp
Patent: 6,984,588 →
Application: 10/694,408 →
Publication: US 2004/0089634
Polishing Pad Comprising Biodegradable Polymer
Patent: 7,264,641 →
Application: 10/705,533 →
Publication: US 2005/0098540
Chemical-Mechanical Polishing of Metals in an Oxidized Form
Patent: 7,288,021 →
Application: 10/753,138 →
Publication: US 2005/0148290
Integrated Polishing and Electroless Deposition
Patent: 6,984,587 →
Application: 10/753,269 →
Publication: US 2005/0153554
Polishing System Comprising a Highly Branched Polymer
Patent: 7,255,810 →
Application: 10/755,154 →
Publication: US 2005/0150598
Method of Operating and Process for Fabricating an Electron Source
Patent: 7,317,278 →
Application: 10/763,552 →
Publication: US 2004/0150322
Method of Polishing a Silicon-Containing Dielectric
Patent: 7,442,645 →
Application: 10/543,848 →
Publication: US 2006/0196848
Microporous Polishing Pads
Patent: 6,896,593 →
Application: 10/792,183 →
Publication: US 2004/0171338
Microporous Polishing Pads
Patent: 6,899,598 →
Application: 10/792,344 →
Publication: US 2004/0177563
Microporous Polishing Pads
Patent: 6,935,931 →
Application: 10/792,348 →
Publication: US 2004/0171340
Boron-Containing Polishing System and Method
Patent: 7,001,253 →
Application: 10/801,316 →
Publication: US 2004/0180612
Cmc Porous Pad with Component-Filled Pores
Patent: 7,195,544 →
Application: 10/807,064 →
Publication: US 2005/0215177
Low Surface Energy Cmp Pad
Patent: 7,059,936 →
Application: 10/807,079 →
Publication: US 2005/0215179
Polishing Pad Comprising Hydrophobic Region and Endpoint Detection Port
Patent: 7,204,742 →
Application: 10/808,827 →
Publication: US 2005/0211376
X-Ray Source with Nonparallel Geometry
Patent: 7,274,772 →
Application: 10/854,944 →
Publication: US 2005/0276382
Anionic Abrasive Particles Treated with Positively Charged Polyelectrolytes for Cmp
Patent: 7,306,637 →
Application: 10/855,276 →
Publication: US 2004/0229552
Mobile Ion Memory
Patent: 7,277,314 →
Application: 10/855,281 →
Publication: US 2005/0276143
Three Dimensional Integrated Circuits
Patent: 7,091,604 →
Application: 10/861,007 →
Publication: US 2005/0269665
Electrochemical-Mechanical Polishing System
Patent: 7,438,795 →
Application: 10/865,027 →
Publication: US 2005/0274627
Method of Polishing a Tungsten-Containing Substrate
Patent: 7,247,567 →
Application: 10/869,397 →
Publication: US 2005/0282391
Continuous Contour Polishing of a Multi-Material Surface
Patent: 7,198,549 →
Application: 10/869,605 →
Publication: US 2005/0282470
Polishing Composition for Noble Metals
Patent: 7,161,247 →
Application: 10/901,420 →
Publication: US 2006/0024967
Polishing Pad with Microporous Regions
Patent: 8,075,372 →
Application: 10/931,908 →
Publication: US 2006/0046622
Chemical-Mechanical Polishing Composition and Method for Using the Same
Patent: 7,754,098 →
Application: 10/568,727 →
Publication: US 2008/0057832
Cmp Composition with a Polymer Additive for Polishing Noble Metals
Patent: 7,563,383 →
Application: 10/963,108 →
Publication: US 2006/0076317
Method of Sharpening Cutting Edges
Patent: 7,037,175 →
Application: 10/968,571 →
Publication: US 2006/0084367
Metal Ion-Containing Cmp Composition and Method for Using the Same
Patent: 8,038,752 →
Application: 10/974,460 →
Publication: US 2006/0086055
Cmp Composition Comprising Surfactant
Patent: 7,524,347 →
Application: 10/975,585 →
Publication: US 2006/0096496
Polishing Composition and Method for High Silicon Nitride to Silicon Oxide Removal Rate Ratios
Patent: 7,504,044 →
Application: 10/982,486 →
Publication: US 2006/0099814
Chemical Mechanical Polishing Systems and Methods for Their Use
Patent: 7,354,530 →
Application: 11/033,068 →
Publication: US 2005/0148187
Method of Preparing a Conductive Film
Patent: 7,686,994 →
Application: 11/070,695 →
Publication: US 2006/0199002
Carbon Nanotube-Based Electronic Switch
Patent: 7,456,482 →
Application: 11/084,287 →
Publication: US 2006/0273871
Tribo-Chronoamperometry as a Tool for Cmp Application
Patent: 7,497,938 →
Application: 11/088,075 →
Publication: US 2006/0213781
Polymeric Inhibitors for Enhanced Planarization
Patent: 7,311,856 →
Application: 11/093,806 →
Publication: US 2006/0226126
Multi-Layer Polishing Pad Material for Cmp
Patent: 7,435,161 →
Application: 11/113,498 →
Publication: US 2005/0197050
Polishing Slurries for Copper and Associated Materials
Patent: 7,427,567 →
Application: 11/145,807 →
Publication: US 2006/0084272
Controlled Electrochemical Polishing Method
Patent: 7,998,335 →
Application: 11/150,944 →
Publication: US 2006/0281196
Transparent Microporous Materials for Cmp
Patent: 7,267,607 →
Application: 11/158,694 →
Publication: US 2005/0277371
Use of Cmp for Aluminum Mirror and Solar Cell Fabrication
Patent: 8,062,096 →
Application: 11/173,518 →
Publication: US 2007/0010098
Compositions and Methods for Tantalum Cmp
Patent: 7,316,603 →
Application: 11/235,765 →
Publication: US 2006/0030158
Composition and Method for Planarizing Surfaces
Patent: 7,955,519 →
Application: 11/241,137 →
Publication: US 2007/0075040
Decontamination and Sterilization System Using Large Area X-Ray Source
Patent: 7,447,298 →
Application: 11/241,214 →
Publication: US 2006/0049359
Cmp of Copper/Ruthenium Substrates
Patent: 7,265,055 →
Application: 11/259,645 →
Publication: US 2007/0090094
Method for Manufacturing Microporous Cmp Materials Having Controlled Pore Size
Patent: 7,311,862 →
Application: 11/265,607 →
Publication: US 2006/0052040
Polishing Composition and Method for High Silicon Nitride to Silicon Oxide Removal Rate Ratios
Patent: 7,531,105 →
Application: 11/294,853 →
Publication: US 2006/0108326
Oxidation-Stabilized Cmp Compositions and Methods
Patent: 7,732,393 →
Application: 11/384,538 →
Publication: US 2007/0219104
Halide Anions for Metal Removal Rate Control
Patent: 7,820,067 →
Application: 11/388,085 →
Publication: US 2007/0224822
Polishing Composition Containing Polyether Amine
Patent: 7,585,340 →
Application: 11/412,369 →
Publication: US 2007/0251155
Gold Cmp Composition and Method
Patent: 7,368,066 →
Application: 11/444,866 →
Publication: US 2007/0278184
Tunable Selectivity Slurries in Cmp Applications
Patent: 7,294,576 →
Application: 11/478,023 →
Tantalum Cmp Compositions and Methods
Patent: 7,998,228 →
Application: 11/489,054 →
Publication: US 2008/0016784
Gallium and Chromium Ions for Oxide Rate Enhancement
Patent: 7,501,346 →
Application: 11/491,055 →
Publication: US 2008/0020577
Silicon Carbide Polishing Method Utilizing Water-Soluble Oxidizers
Patent: 7,678,700 →
Application: 11/515,546 →
Publication: US 2008/0057713
Polyoxometalate Compositions and Methods
Patent: 8,057,561 →
Application: 11/518,674 →
Publication: US 2008/0060277
Compositions and Methods for Cmp of Low-K-Dielectric Materials
Patent: 7,456,107 →
Application: 11/595,536 →
Publication: US 2008/0111101
Composition and Method for Damascene Cmp
Patent: 7,837,888 →
Application: 11/599,199 →
Publication: US 2008/0113589
System for the Preferential Removal of Silicon Oxide
Patent: 7,365,013 →
Application: 11/620,517 →
Publication: US 2007/0120090
Compositions and Methods for Cmp of Phase Change Alloys
Patent: 7,897,061 →
Application: 11/699,129 →
Publication: US 2007/0178700
Polishing Composition for a Tungsten-Containing Substrate
Patent: 7,582,127 →
Application: 11/670,137 →
Publication: US 2007/0214728
Compositions and Methods for Cmp of Semiconductor Materials
Patent: 7,803,203 →
Application: 11/673,399 →
Publication: US 2007/0181535
Cmp System Utilizing Halogen Adduct
Patent: 7,776,230 →
Application: 11/673,518 →
Publication: US 2008/0057715
Method and Apparatus for Measurement of Magnetic Permeability of a Material
Patent: 7,557,566 →
Application: 11/681,258 →
Publication: US 2008/0214092
Cmp Porous Pad with Component-Filled Pores
Patent: 7,699,684 →
Application: 11/690,944 →
Publication: US 2007/0180778
X-Ray Source with Nonparallel Geometry
Patent: 7,542,549 →
Application: 11/779,752 →
Publication: US 2008/0008294
Ruthenium Cmp Compositions and Methods
Patent: 8,008,202 →
Application: 11/888,406 →
Publication: US 2009/0035942
Low Ph Barrier Slurry Based on Titanium Dioxide
Patent: 7,803,711 →
Application: 11/856,790 →
Publication: US 2009/0075566
Copper-Passivating Cmp Compositions and Methods
Patent: 7,955,520 →
Application: 11/986,921 →
Publication: US 2009/0134122
Method of Operating and Process for Fabricating an Electron Source
Patent: 7,875,469 →
Application: 12/001,631 →
Publication: US 2008/0095315
Composition and Method for Polishing Nickel-Phosphorous-Coated Aluminum Hard Disks
Patent: 7,922,926 →
Application: 11/970,978 →
Publication: US 2009/0173717
Silicon Carbide Polishing Method Utilizing Water-Soluble Oxidizers
Patent: 7,998,866 →
Application: 12/043,010 →
Publication: US 2008/0153292
Stable, High Rate Silicon Slurry
Patent: 8,017,524 →
Application: 12/126,739 →
Publication: US 2009/0291559
Polishing Composition and Method Utilizing Abrasive Particles Treated with an Aminosilane
Patent: 7,994,057 →
Application: 12/234,173 →
Publication: US 2009/0081871
Polishing Composition and Method for High Silicon Nitride to Silicon Oxide Removal Rate Ratios
Patent: 7,846,842 →
Application: 12/364,253 →
Publication: US 2009/0137124
Chemical-Mechanical Polishing Composition and Method for Using the Same
Patent: 8,101,093 →
Application: 12/393,489 →
Publication: US 2009/0152240
Polishing Pad Carrier
Patent: 640,057 →
Application: 29/337,774 →
Related Assignments (25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Feb 2, 2004
From: PRASAD, ABANESHWAR; MYERS, RONALD E.
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 014297/0849 →
Assignment of Assignor's Interest Sep 13, 2005
From: CHERIAN, ISAAC K.; MOEGGENBORG, KEVIN J.
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 016527/0560 →
Assignment of Assignor's Interest Apr 28, 2006
From: LI, SHOUTIAN; CARTER, PHILLIP W; ZHANG, JIAN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 017545/0420 →
Assignment of Assignor's Interest May 1, 2006
From: CHEN, ZHAN; VACASSY, ROBERT; CARTER, PHILLIP W.; DYSARD, JEFFREY M.
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 017557/0230 →
Assignment of Assignor's Interest Jul 7, 2006
From: DYSARD, JEFFREY; ANJUR, SRIRAM; JOHNS, TIMOTHY; CHEN, ZHAN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 017890/0859 →
Assignment of Assignor's Interest Oct 18, 2006
From: WHITE, MICHAEL L; CHEN, ZHAN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 018404/0322 →
Assignment of Assignor's Interest Dec 11, 2006
From: BRUSIC, VLASTA; ZHOU, RENJIE; THOMPSON, CHRISTOPHER C.; FEENEY, PAUL
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 018609/0102 →
Assignment of Assignor's Interest Feb 14, 2007
From: BRUSIC, VLASTA; ZHOU, RENJIE; FEENEY, PAUL; THOMPSON, CHRISTOPHER
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 018888/0032 →
Assignment of Assignor's Interest Feb 23, 2007
From: VACASSY, ROBERT; BAYER, BENJAMIN; CHEN, ZHAN; CHAMBERLAIN, JEFFREY P.
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 018925/0103 →
Assignment of Assignor's Interest Apr 26, 2007
From: CARTER, PHILLIP; NAGUIB, NEVIN; SUN, FRED
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 019218/0326 →
Assignment of Assignor's Interest May 31, 2007
From: BAYER, BENJAMIN; CHEN, ZHAN; CHAMBERLAIN, JEFFREY P; VACASSY, ROBERT
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 019363/0269 →
Assignment of Assignor's Interest Aug 7, 2007
From: WHITE, DANIELA; PARKER, JOHN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 019659/0335 →
Assignment of Assignor's Interest Aug 27, 2007
From: HOU, HUI-FANG; LIU, WEN-CHENG; CHEN, YEN-LIANG; CHEN, JUI-CHING
To: EPOCH MATERIAL CO., LTD.
Reel/Frame 019793/0494 →
Assignment of Assignor's Interest Oct 5, 2007
From: WHITE, DANIELA; KELEHER, JASON; PARKER, JOHN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 019926/0408 →
Assignment of Assignor's Interest Feb 20, 2008
From: LI, SHOUTIAN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 020533/0009 →
Assignment of Assignor's Interest Jun 18, 2008
From: LI, SHOUTIAN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 021113/0330 →
Assignment of Assignor's Interest Jan 22, 2009
From: VACASSY, ROBERT; ZHOU, RENJIE
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 022143/0609 →
Assignment of Assignor's Interest Feb 7, 2009
From: ANJUR, SRIRAM; DYSARD, JEFFREY; FEENEY, PAUL; JOHNS, TIMOTHY
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 022221/0854 →
Assignment of Assignor's Interest Feb 8, 2010
From: NAGUIB, NEVIN; MOEGGENBORG, KEVIN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 023913/0576 →
Assignment of Assignor's Interest Feb 18, 2010
From: MOEGGENBORG, KEVIN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 023959/0345 →
Release of Security Interest Nov 16, 2018
From: BANK OF AMERICA, N.A.
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 047587/0119 →
Security Agreement Nov 16, 2018
From: CABOT MICROELECTRONICS CORPORATION; QED TECHNOLOGIES INTERNATIONAL, INC.; FLOWCHEM LLC; KMG ELECTRONIC CHEMICALS, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 047588/0263 →
Change of Name Jan 13, 2021
From: CABOT MICROELECTRONICS CORPORATION
To: CMC MATERIALS, INC.
Reel/Frame 054980/0681 →
Release of Security Interest Jul 6, 2022
From: JPMORGAN CHASE BANK, N.A.
To: CABOT MICROELECTRONICS CORPORATION; QED TECHNOLOGIES INTERNATIONAL, INC.; FLOWCHEM LLC; KMG ELECTRONIC CHEMICALS, INC.
Reel/Frame 060592/0260 →
Security Interest Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →