IP Library Granted Patent US 7,317,278
Granted Patent B2
US 7,317,278 · App. 10/763,552 · Granted Jan 8, 2008

Method of operating and process for fabricating an electron source

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Quick Facts
Patent No.
US 7,317,278
App. No.
10/763,552
Granted
Jan 8, 2008
Kind
B2
Abstract

A method of operating and process for fabricating an electron source. A conductive rod is covered by an insulating layer, by dipping the rod in an insulation solution, for example. The rod is then covered by a field emitter material to form a layered conductive rod. The rod may also be covered by a second insulating material. Next, the materials are removed from the end of the rod and the insulating layers are recessed with respect to the field emitter layer so that a gap is present between the field emitter layer and the rod. The layered rod may be operated as an electron source within a vacuum tube by applying a positive bias to the rod with respect to the field emitter material and applying a higher positive bias to an anode opposite the rod in the tube. Electrons will accelerate to the charged anode and generate soft X-rays.

Claims (33)

1. A field emission electrode comprising a layered conductive rod comprising:

a central conductive rod having a base and side walls;

a first insulating layer covering the side walls;

a field emitter layer covering the first insulating layer; and

a second insulating layer covering the field emitter layer.

2. The layered conductive rod of claim 1 , wherein the central conductive rod is selected from the group consisting of a cylindrical rod, a rectangular rod, and a triangular rod.

3. The layered conductive rod of claim 1 , having a diameter of about 200 μm to about 1000 μm.

4. The layered conductive rod of claim 1 , wherein the central conductive rod is selected from the group consisting of a copper rod and a tungsten rod.

5. The layered conductive rod of claim 1 , wherein the central conductive rod comprises a rod having a conductive layer covering the rod.

6. The layered conductive rod of claim 5 , wherein the rod comprises a material selected from the group consisting of an insulating material and a conductive material.

7. The layered conductive rod of claim 1 , wherein the field emitter layer is a carbon-based material.

8. The layered conductive rod of claim 7 , wherein the carbon-based material is selected from the group consisting of carbon nanotubes, vulcan black, and vulcan black mixed with nanoparticle size silica.

9. The layered conductive rod of claim 1 , wherein the first insulating layer and the field emitter layer form concentric layers around the side walls of the central conductive rod.

10. The layered conductive rod of claim 1 , wherein the base of the central conductive rod is exposed.

11. The layered conductive rod of claim 10 , wherein the side walls are layered in the proximity of the base.

12. The layered conductive rod of claim 11 , wherein the first insulating layer is recessed from the base.

13. The layered conductive rod of claim 1 , wherein the layered conductive rod is an electron source.

14. A method of operating a vacuum tube comprising the layered conductive rod of claim 1 .

15. A vacuum tube comprising:

a housing; and

a field emission electrode comprising a layered conductive rod positioned in the housing, the layered conductive rod including:

a central conductive rod having a base and side walls;

a first insulating layer covering the side walls;

a field emitter layer covering the first insulating layer; and

a second insulating layer covering the field emitter layer.

16. The vacuum tube of claim 15 , wherein the field emitter layer is a carbon-based material.

17. The vacuum tube of claim 16 , wherein the carbon-based material is selected from the group consisting of carbon nanotubes, vulcan black, and vulcan black mixed with nanoparticle size silica.

18. The vacuum tube of claim 15 , wherein the base of the central conductive rod is exposed and the side walls are layered in the proximity of the base.

19. The vacuum tube of claim 15 , wherein the housing comprises a glass envelope.

20. The vacuum tube of claim 15 , wherein the housing comprises a tube of a catheter.

21. The vacuum tube of claim 15 , further comprising a second conductive rod positioned in the housing opposite the base of the central conductive rod.

22. The vacuum tube of claim 15 , further comprising a getter bead inserted within the housing.

23. The vacuum tube of claim 15 , further comprising a layer of conductive material covering at least a portion of the housing.

Assignments (2)
RELEASE OF SECURITY INTEREST Recorded Nov 16, 2018
From: BANK OF AMERICA, N.A.
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 047587/0119 →
NOTICE OF SECURITY INTEREST IN PATENTS Recorded Feb 16, 2012
From: CABOT MICROELECTRONICS CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027727/0275 →