Method of operating and process for fabricating an electron source
View Patent ↗A method of operating and process for fabricating an electron source. A conductive rod is covered by an insulating layer, by dipping the rod in an insulation solution, for example. The rod is then covered by a field emitter material to form a layered conductive rod. The rod may also be covered by a second insulating material. Next, the materials are removed from the end of the rod and the insulating layers are recessed with respect to the field emitter layer so that a gap is present between the field emitter layer and the rod. The layered rod may be operated as an electron source within a vacuum tube by applying a positive bias to the rod with respect to the field emitter material and applying a higher positive bias to an anode opposite the rod in the tube. Electrons will accelerate to the charged anode and generate soft X-rays.
1. A process for fabricating an electron source, consisting essentially of:
(a) covering at least one end of a conductive rod with a first insulating layer, wherein at least one end of the conductive rod further comprises a base and a side wall,
(b) covering at least a portion of the first insulating layer with a layer of a field emitter material to form a field emitter layer,
(c) covering at least a portion of the field emitter layer with a second insulating layer,
(d) covering at least one end of the conductive rod with a layer of a protective material, wherein the protective material is in contact with the second insulating layer,
(e) removing the first insulating layer and the field emitter layer from the base of the conductive rod to form a conductive rod having an exposed base and a side wall that is layered in the proximity of the exposed base,
(f) removing a portion of the first insulating layer so that the first insulating layer is recessed with respect to the exposed base, and
(g) removing at least a portion of the layer of the protective material, wherein step (g) is performed after step (e) and before step (f).
2. The process of claim 1 , wherein step (a) comprises covering the base and a perimeter of a side wall adjacent the base.
3. The process of claim 1 , wherein steps (a)-(b) comprise at least covering the side wall.
4. The process of claim 1 , wherein the first insulating layer comprises a thickness in the range of about 0.5 μm to about 10 μm.
5. The process of claim 1 , wherein the field emitter layer comprises a thickness in the range of about 0.1 μm to about 4 μm.
6. The process of claim 1 , wherein step (a) comprises dipping at least one end of the conductive rod into an insulating liquid and allowing the conductive rod to cure.
7. The process of claim 1 , wherein step (b) comprises dipping at least one end of the conductive rod into a carbon-based solution and allowing the conductive rod to cure.
8. The process of claim 1 , wherein steps (a)-(b) comprise a process selected from the group consisting of sputtering and chemical vapor deposition.
9. The process of claim 1 , wherein removing is accomplished by a process selected from the group consisting of polishing and grinding.