METHOD FOR COPPER CMP USING POLYMERIC COMPLEXING AGENTS

Inventors: David J. Schroeder, Phillip Carter, Jeffrey P. Chamberlain, Kyle Miller, Isaac K. Cherian

Patented Case View Patent ↗ View Publication ↗

	Code	Description	Pages	PDF
2004-10-26	`BIB`	Bibliographic Data Sheet	1	View
2004-10-07	`IFEE`	Issue Fee Payment (PTO-85B)	1	View
2004-08-03	`NOA`	Notice of Allowance and Fees Due (PTOL-85)	3	View
2004-08-03	`NOA`	Notice of Allowance and Fees Due (PTOL-85)	3	View
2004-08-03	`1449`	List of References cited by applicant and considered by examiner	4	View
2004-08-03	`IIFW`	Issue Information including classification, examiner, name, claim, renumbering, etc.	1	View
2004-08-03	`FWCLM`	Index of Claims	1	View
2004-08-03	`BIB`	Bibliographic Data Sheet	1	View
2004-08-03	`SRFW`	Search information including classification, databases and other search related notes	1	View
2004-04-14	`NOA`	Notice of Allowance and Fees Due (PTOL-85)	4	View
2004-04-14	`892`	List of references cited by examiner	1	View
2004-04-14	`1449`	List of References cited by applicant and considered by examiner	2	View
2004-04-12	`SRNT`	Examiner's search strategy and results	1	View
2004-02-02	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	5	View
2004-02-02	`FOR`	Foreign Reference	5	View
2004-02-02	`FOR`	Foreign Reference	25	View
2003-06-24	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	2	View
2003-06-24	`FOR`	Foreign Reference	1	View
2003-06-24	`FOR`	Foreign Reference	18	View
2002-09-18	`LET.`	Miscellaneous Incoming Letter	1	View
2002-09-18	`IIFW`	Issue Information including classification, examiner, name, claim, renumbering, etc.	1	View
2002-09-18	`SRFW`	Search information including classification, databases and other search related notes	1	View
2002-09-18	`FWCLM`	Index of Claims	1	View
2002-09-18	`TRNA`	Transmittal of New Application	2	View
2002-09-18	`DRW`	Drawings-only black and white line drawings	7	View
2002-09-18	`SPEC`	Specification	27	View
2002-09-18	`CLM`	Claims	4	View
2002-09-18	`ABST`	Abstract	1	View
2002-09-18	`OATH`	Oath or Declaration filed	3	View
2002-09-18	`WFEE`	Fee Worksheet (SB06)	1	View
2002-09-18	`WFEE`	Fee Worksheet (SB06)	1	View
2002-09-18	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2002-09-18	`FOR`	Foreign Reference	15	View
2002-09-18	`FOR`	Foreign Reference	23	View
2002-09-18	`FOR`	Foreign Reference	12	View
2002-09-18	`FOR`	Foreign Reference	6	View
2002-09-18	`FOR`	Foreign Reference	14	View
2002-09-18	`FOR`	Foreign Reference	16	View
2002-09-18	`FOR`	Foreign Reference	34	View
2002-09-18	`FOR`	Foreign Reference	29	View
2002-09-18	`ADS`	Application Data Sheet	5	View

Inventors

David J. Schroeder Aurora, IL

Phillip Carter Naperville, IL

Jeffrey P. Chamberlain Aurora, IL

Kyle Miller Oswego, IL

Isaac K. Cherian Aurora, IL

Attorneys & Agents of Record

THOMAS OMHOLT Reg. 37052 Agent · CABOT MICROELECTRONICS CORPORATION

BRIAN SZYMANSKI Reg. 39523 Attorney · ENGTEGRIS, INC.

SOMMER SKEPS Reg. 83192 Attorney · ENTEGRIS INC.

NIDHI KISSOON Reg. 69108 Attorney · INTERNATIONAL BUSINESS MACHINES, IBM

ERIC NIELSON Reg. 72825 Attorney · ENTEGRIS

MEGAN URRUTIA Reg. 77893 Agent

CATHERINE GATES Reg. 51132 Agent · ENTEGRIS

ERIKA SINGLETON Reg. 52368 Attorney · CABOT MICROELECTRONICS LEGAL DEPARTMENT

COLIN DURHAM Reg. 52843 Attorney · ENTEGRIS, INC.

SAMUEL BLIESNER Reg. 81591 Agent · ENTEGRIS, INC.

Classification

USPC 438/692

C23F3/06 H10P52/403 C09G1/02 C09K3/1436 C09K3/1463

Prosecution

Examiner: GHYKA, ALEXANDER G
Art Unit: 2812
Customer No.: 29050
Docket No.: 100036
Confirmation No.: 9973

Publication

Pub. No.: US20030124959A1
Pub. Date: 2003-07-03

Patent Term Adjustment

0days

CABOT MICROELECTRONICS CORPORATION, QED TECHNOLOGIES INTERNATIONAL, INC., FLOWCHEM LLC, KMG ELECTRONIC CHEMICALS, INC., KMG-BERNUTH, INC., MPOWER SPECIALTY CHEMICALS LLC, SEALWELD (USA), INC., INTERNATIONAL TEST SOLUTIONS, LLC, CMC MATERIALS, INC.

from JPMORGAN CHASE BANK, N.A.

RELEASE OF SECURITY INTEREST Recorded 2022-07-06

060592/0260 →

CMC MATERIALS, INC.

from CABOT MICROELECTRONICS CORPORATION

CHANGE OF NAME Recorded 2021-01-13

054980/0681 →

CABOT MICROELECTRONICS CORPORATION

from BANK OF AMERICA, N.A.

RELEASE OF SECURITY INTEREST Recorded 2018-11-16

047587/0119 →

JPMORGAN CHASE BANK, N.A.

from CABOT MICROELECTRONICS CORPORATION, FLOWCHEM LLC, KMG ELECTRONIC CHEMICALS, INC., MPOWER SPECIALTY CHEMICALS LLC, QED TECHNOLOGIES INTERNATIONAL, INC.

SECURITY AGREEMENT Recorded 2018-11-16

047588/0263 →

BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT

from CABOT MICROELECTRONICS CORPORATION

NOTICE OF SECURITY INTEREST IN PATENTS Recorded 2012-02-16

027727/0275 →

CABOT MICROELECTRONICS CORPORATION

from CHERIAN, ISAAC K., SCHROEDER, DAVID J., MILLER, KYLE, CARTER, PHILIP, CHAMBERLAIN, JEFFREY P.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2002-10-23

013192/0848 →

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