Metal cations for initiating polishing
View Patent ↗The invention provides methods for planarizing or polishing a metal surface. The method comprises a composition comprising an abrasive, cesium ions, and a liquid carrier comprising water.
1. The method of chemically-mechanically polishing a substrate comprising tantalum, comprising:
(a) providing a substrate,
(b) contacting thesubstrate with a polishing pad and a chemical-mechanical polishing composition comprising:
(i) about 0.05 wt. % to about 0.75 wt. % of silica abrasive, based on the total weight of the polishing composition,
(ii) about 0.5 to about 50 mmol/kg of cesium ions, based on the total weight of the polishing composition, and
(iii) a liquid carrier comprising water, wherein the composition has a pH of about 8 to about 14, and wherein the composition further comprises an oxidizing agent selected from the group consisting of bromates, bromites, chlorates, chlorites, hydrogen peroxide, hypochlorites, iodates, monoperoxy sulfate, monoperoxy sulfite, monoperoxyphosphate, monoperoxyhypophosphate, monoperoxypyrophosphate, organo-halo-oxy compounds, periodates, permanganate, peroxyacetic acid, benzoquinones, naphthoquinones, anthraquinones, thionines, indigos, and mixtures thereof,
(c) moving the polishing pad relative to the substrate with the chemical-mechanical polishing composition therebetween, and
(d) abrading at least a portion of the tantalum from the substrate to polish the substrate.
2. The method of claim 1 , wherein the cesium ions are present in an amount of about 3 mmol/kg to about 30 mmol/kg, based on the total weight of the polishing composition.
3. The method of claim 1 , wherein the cesium ions are obtained by dissolution in the water of a compound selected from the group consisting of cesium chloride, cesium iodide, cesium carbonate, cesium nitrate, and cesium sulfate.
4. The method of claim 1 , wherein the silica abrasive is present in an amount of about 0.1 wt. % to about 0.75 wt. %, based on the total weight of the polishing composition.
5. The method of claim 4 , wherein the silica abrasive is present in an amount of about 0.2 wt. % to about 0.5 wt. %, based on the total weight of the polishing composition.
6. The method of claim 1 , wherein the silica composition has a pH of about 9 to about 12.