Granted Patent
Utility
US 6,541,434
· Confirmation No. 9268
CLEANING SOLUTION FOR SEMICONDUCTOR SURFACES FOLLOWING CHEMICAL-MECHANICAL POLISHING
Inventor:
Shumin Wang
Inventors
Shumin Wang
Naperville, IL
Attorneys & Agents of Record
Classification
USPC
510/175
H10P70/277
C11D7/265
C11D2111/22
C11D1/46
C11D7/3209
C11D7/3218
C11D7/36
Prosecution
- Examiner
- BOYER, CHARLES I
- Art Unit
- 1751
- Customer No.
- 29050
- Docket No.
- 98125DIV
- Confirmation No.
- 9268
Publication
- Pub. No.
- US20020169088A1
- Pub. Date
- 2002-11-14
Patent Term Adjustment
0days
CABOT MICROELECTRONICS CORPORATION,
QED TECHNOLOGIES INTERNATIONAL, INC.,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
KMG-BERNUTH, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
SEALWELD (USA), INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
CMC MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2022-07-06
RELEASE OF SECURITY INTEREST
Recorded 2018-11-16
from
CABOT MICROELECTRONICS CORPORATION,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY AGREEMENT
Recorded 2018-11-16
NOTICE OF SECURITY INTEREST IN PATENTS
Recorded 2012-02-16
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Quick Facts
- Patent No.
- US 6,541,434
- App. No.
- 10/154,231
- Filed
- 2002-05-23
- Granted
- 2003-04-01
- Pub. No.
- US20020169088A1
- Examiner
- BOYER, CHARLES I
- Art Unit
- 1751
- PTA
- 0 days
External Links