Granted Patent
Utility
US 6,569,350
· Confirmation No. 5025
CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-15 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-03-15 | ADS |
Application Data Sheet | 2 | View | |
| 2002-03-15 | A.PE |
Preliminary Amendment | 6 | View | |
| 2002-03-15 | SPEC |
Specification | 31 | View | |
| 2002-03-15 | CLM |
Claims | 4 | View | |
| 2002-03-15 | ABST |
Abstract | 1 | View | |
| 2002-03-15 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-03-15 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
252/79.1
C23F3/06
H10P52/403
C09G1/02
C23F3/00
Prosecution
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- Customer No.
- 29050
- Docket No.
- 96071ACIP3
- Confirmation No.
- 5025
Publication
- Pub. No.
- US20020145127A1
- Pub. Date
- 2002-10-10
Patent Term Adjustment
0days
Parent
is a Continuation of
→
App. 09/660,847
· US 6,362,106
Filed 2000-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Division of
→
App. 08/944,036
· US 6,309,560
Filed 1997-09-29
· Patented Case
Parent
is a Continuation in-part of
→
App. 08/891,649
· US 6,126,853
Filed 1997-07-11
· Patented Case
Parent
is a Continuation in-part of
→
App. 08/763,705
· US 5,954,997
Filed 1996-12-09
· Patented Case
CABOT MICROELECTRONICS CORPORATION,
QED TECHNOLOGIES INTERNATIONAL, INC.,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
KMG-BERNUTH, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
SEALWELD (USA), INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
CMC MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2022-07-06
RELEASE OF SECURITY INTEREST
Recorded 2018-11-16
from
CABOT MICROELECTRONICS CORPORATION,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY AGREEMENT
Recorded 2018-11-16
NOTICE OF SECURITY INTEREST IN PATENTS
Recorded 2012-02-16
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Quick Facts
- Patent No.
- US 6,569,350
- App. No.
- 10/099,492
- Filed
- 2002-03-15
- Granted
- 2003-05-27
- Pub. No.
- US20020145127A1
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- PTA
- 0 days
External Links