Meta oxide coated carbon black for CMP
View Patent ↗Using coated carbon black particles, coated with a selected coating material, as an abrasive in slurries or polishing pads for chemical-mechanical polishing processes. By adjusting the coating material on the carbon black particles, new abrasive particles for chemical-mechanical polishing are created with tailored performance properties.
1. A chemical-mechanical polishing slurry comprising abrasive particles dispersed in an aqueous medium wherein the abrasive particles are carbon black coated with a coating material, and wherein the coating material is a metal oxide, the slurry further including at least one ingredient selected from the group consisting of an oxidizing agent, a film forming agent, a stopping compound and an organic acid.
2. The chemical-mechanical polishing slurry of claim 1 wherein the coating material is selected from the group consisting of silica oxide, ceria oxide, titanium oxide, zirconium oxide, alumina oxide, and germania oxide.
3. The chemical-mechanical polishing slurry of claim 1 wherein at least 10% of the surface of the carbon black is covered with the coating material.
4. The chemical-mechanical polishing slurry of claim 1 wherein the abrasive particles are less than 10 micrometers in size.
5. The chemical mechanical polishing slurry of claim 4 wherein the abrasive particles are less than 1 micrometer in size.
6. The chemical mechanical polishing slurry of claim 1 wherein the slurry comprises from about 0.1% to about 20% (w/w) of abrasive particles.
7. The chemical-mechanical polishing slurry of claim 1 wherein the organic acid is selected from the group consisting of phosphoric acid, carbonic acid, mono-carboxylic acid, di-carboxylic acid or poly-carboxylic acid.
8. The chemical-mechanical polishing slurry of claim 1 wherein the slurry has a pH from about 1.0 to about 8.0.