MEM switching device
View Patent ↗A MEM device and method for fabricating a MEM device. A MEM device comprising a lever mechanism residing along a substrate is disclosed. A contact material is deposited on a first surface of the lever mechanism. In one arrangment, the first surface is disposed towards the substrate. A first contact region may be deposited on the substrate. The first contact region attracts the lever mechanism towards the substrate such that the contact material becomes operationally coupled to a second contact region. The MEM device may also comprise a first anchor portion and a second anchor portion. The first and second anchor portions may be integral to a top surface of the substrate. Aspects of the invention are also particularly useful in providing an encapsulated MEM switching device.
1. A micro-machined structure for enclosing at least one MEM device, said structure comprising:
a structure extending from a substrate and at least partially enclosing said at least one MEM device; and
a cover structure residing on a portion of said substrate structure,
a contact region, said contact region provided on said cover substrate structure, said
contact region acting as a pull-back contact for a MEM device residing on said substrate;
wherein said micro-machined structure defines at least one tortuous path, wherein said tortuous path provides for a removal of material residing along said substrate structure.
2. The invention of claim 1 wherein said contact region comprises a shielding member, said shielding member preventing passage of electromagnetic radiation.
3. The invention of claim 1 further comprising a sealing member, said sealing member engaging said tortuous path such that said sealing member seals said enclosure.
4. The invention of claim 3 further comprising a gaseous material provided in said sealed enclosure.
5. The invention of claim 4 wherein said gaseous material comprises an inert gas.
6. The invention of claim 4 wherein said gaseous material comprises an arc preventing gaseous material.
7. The invention of claim 3 wherein said sealing member seals said enclosure in a vacuum sealed state.
8. The invention of claim 1 wherein said tortuous path defines a labyrinth path.
9. The invention of claim 1 further comprising a second MEM device, said second MEM device enclosed by said micro-machined structure.
10. The invention of claim 1 wherein said micro-machined apparatus is an integral micro-machined structure.
11. The invention of claim 1 wherein said micro-machined structure for enclosing at least one MEM device comprises diamond.