IP Library › Granted Patent US 6,447,371
Granted Patent Utility
US 6,447,371 · Confirmation No. 5258

CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER/TANTALUM SUBSTRATES

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-03-06 TRNA Transmittal of New Application 1 View
2001-03-06 SPEC Specification 28 View
2001-03-06 CLM Claims 7 View
2001-03-06 ABST Abstract 1 View
2001-03-06 OATH Oath or Declaration filed 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,447,371
App. No.
09/800,009
Filed
2001-03-06
Granted
2002-09-10
Pub. No.
US20010041507A1
Art Unit
3723
PTA
0 days