Granted Patent
Utility
US 6,527,817 · App. 09/625,142
Composition and method for planarizing surfaces
Inventors:
Mingming Fang, Brian L. Mueller, James A. Dirksen
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Jul 25, 2000
Inventors
Mingming Fang
Brian L. Mueller
James A. Dirksen
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.