Granted Patent
Utility
US 6,527,622
· Confirmation No. 3879
CMP METHOD FOR NOBLE METALS
Patented Case
View Patent ↗
Inventors
Vlasta Brusic
Geneva, IL
Francesco M. De Rege
Naperville, IL
Kevin J. Moeggenborg
Naperville, IL
Isaac K. Cherian
Aurora, IL
Renjie Zhou
Aurora, IL
Attorneys & Agents of Record
Classification
USPC
451/41
H10P52/403
H10D1/694
B24B37/044
C09G1/02
C09K3/1463
C23F3/04
C23F3/06
Prosecution
- Examiner
- SHAKERI, HADI
- Art Unit
- 3723
- Customer No.
- 29050
- Docket No.
- 00012
- Confirmation No.
- 3879
Patent Term Adjustment
-5days
CABOT MICROELECTRONICS CORPORATION,
QED TECHNOLOGIES INTERNATIONAL, INC.,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
KMG-BERNUTH, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
SEALWELD (USA), INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
CMC MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2022-07-06
RELEASE OF SECURITY INTEREST
Recorded 2018-11-16
from
CABOT MICROELECTRONICS CORPORATION,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY AGREEMENT
Recorded 2018-11-16
NOTICE OF SECURITY INTEREST IN PATENTS
Recorded 2012-02-16
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-25
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Quick Facts
- Patent No.
- US 6,527,622
- App. No.
- 10/054,059
- Filed
- 2002-01-22
- Granted
- 2003-03-04
- Examiner
- SHAKERI, HADI
- Art Unit
- 3723
- PTA
- -5 days
External Links