CMP method for noble metals
View Patent ↗The invention provides a method of polishing a substrate comprising a noble metal comprising (i) contacting the substrate with a CMP system and (ii) abrading at least a portion of the substrate to polish the substrate. The CMP system comprises an abrasive and/or polishing pad, a liquid carrier, and a sulfonic acid compound.
1. A method of polishing a substrate comprising:
(i) contacting a substrate comprising a noble metal selected from the group consisting of platinum, iridium, rhenium, ruthenium, rhodium, palladium, silver, osmium, and gold, with a chemical-mechanical polishing system comprising:
(a) an abrasive, a polishing pad, or a combination thereof
(b) a liquid carrier, and
(c) a sulfonic acid compound selected from the group consisting of pyridineethanesulfonic acids, pyridine sulfonic acids, 1-(3-sulfopropyl)pyridinium hydroxide, sulfanilic acid, dodecyldimethyl(3-sulfopropyl)ammonium hydroxide, 2-(N-morpholino)ethanesulfonic acid, N-2-acetamido-2-aminoethanesulfonic acid, 3-(N-morpholine)propanesulfonic acid, N-tris(hydroxymethyl)methyl-2-aminoethanesulfonic acid, N-2-hydroxyethylpiperazine-N′-2-ethanesulfonic acid, N-2-hydroxyethylpiperazine-N′-3-propanesulfonic acid, cyclohexylaminoethanesulfonic acid, 3-(cyclohexylamino)propanesulfonic acid, 2-acrylamido-2-methylpropanesulfonic acid, benzenesulfonic acid, hydroquinonesulfonic acid, hydroquinolinesulfonic acid, isethionic acid, 4,7-diphenyl-1,10-phenanthrolinedisulfonic acid, 1,2-naphthoquinone-4-sulfonic acid, aminoanthraquinone sulfonic acid, 2-formylbenzenesulfonic acid, 3-amino-4-hydroxybenzenesulfonic acid, 4-hydroxybenzenesulfonic acid, 6-aminotoluene-3-sulfonic acid, benzidine-3-sulfonic acid, diphenylamine-4-sulfonic acid, hydroxylamine-O-sulfonic acid, piperidine sulfonic acid, p-anisidine-3-sulfonic acid, p-xylene-2-sulfonic acid, methanesulfonic acid, 3-cyclohexylamino-1-propanesulfonic acid, 5-formyl-2-furanesulfonic acid, salts thereof, and combinations thereof,
wherein the chemical-mechanical polishing system has a pH of about 2 to about 12, and
(ii) abrading at least a portion of the substrate to polish the substrate.
2. The method of claim 1 , wherein the sulfonic acid compound is selected from the group consisting of 2-pyridineethanesulfonic acid, 4-pyridineethanesulfonic acid, 1-(3-sulfopropyl)pyridinium hydroxide, sulfanilic acid, pyridinesulfonic acid, dodecyldimethyl(3-sulfopropyl)ammonium hydroxide, 2-(N-morpholino)ethanesulfonic acid, N-2-acetamido-2-aminoethanesulfonic acid, 3-(N-morpholine)propanesulfonic acid, N-tris(hydroxymethyl)methyl-2-aminoethanesulfonic acid, N-2-hydroxyethylpiperazine-N′-2-ethanesulfonic acid, N-2-hydroxyethylpiperazine-N′-3-propanesulfonic acid, cyclohexylaminoethanesulfonic acid, 3-(cyclohexylamino)propanesulfonic acid, 2-acrylamido-2-methylpropanesulfonic acid, salts thereof, and combinations thereof.
3. The method of claim 1 , wherein the sulfonic acid compound is selected from the group consisting of hydroquinonesulfonic acid, N-tris(hydroxymethyl)methyl-2-aminoethanesulfonic acid, benzenesulfonic acid, isethionic acid, 5-formyl-2-furanesulfonic acid, salts thereof, and combinations thereof.
4. The method of claim 1 , wherein the chemical-mechanical polishing system comprises an abrasive.
5. The method of claim 4 , wherein the abrasive is a metal oxide selected from the group consisting of alumina, silica, titania, ceria, zirconia, germania, magnesia, co-formed products thereof, and combinations thereof.
6. The method of claim 5 , wherein the abrasive comprises α-alumina.
7. The method of claim 6 , wherein the α-alumina has a mean particle size of about 200 nm or greater.
8. The method of claim 6 , wherein the abrasive further comprises fumed alumina.
9. The method of claim 4 , wherein the system comprises about 0.05 wt. % or more abrasive that is suspended in the carrier and about 0.01 to about 10 wt. % sulfonic acid compound.
10. The method of claim 4 , wherein the abrasive is fixed on a polishing pad.
11. The method of claim 4 , wherein the abrasive is in particulate form and is suspended in the carrier.
12. The method of claim 1 , wherein the liquid carrier comprises water.
13. The method of claim 1 , wherein the substrate comprises platinum, iridium, or ruthenium.
14. The method of claim 13 , wherein the substrate comprises platinum.
15. The method of claim 14 , wherein the system has a pH of about 2 to about 7.