Composition and method for polishing nickel-phosphorous-coated aluminum hard disks
View Patent ↗The invention provides a chemical-mechanical polishing composition consisting essentially of flumed alumina, alpha alumina, silica, a nonionic surfactant, an additive compound selected from the group consisting of glycine, alanine, iminodiacetic acid, and maleic acid, hydrogen peroxide, and water. The invention further provides a method of chemically-mechanically polishing a substrate comprising contacting a substrate with a polishing pad and the chemical-mechanical polishing composition, moving the polishing pad and the polishing composition relative to the substrate, and abrading at least a portion of the substrate to polish the substrate.
1. A chemical-mechanical polishing composition consisting essentially of:
(a) about 0.2 to about 1 wt. % of fumed alumina,
(b) about 0.1 to about 1 wt. % of alpha alumina,
(c) about 0.1 to about 4 wt. % of silica,
(d) about 10 to about 1000 ppm of a nonionic surfactant,
(e) at least 0.8 wt. % to about 1.5 wt. % of an additive compound selected from the group consisting of glycine, alanine, iminodiacetic acid, and maleic acid,
(f) hydrogen peroxide,
(g) optionally a biocide, and
(h) water.
2. The polishing composition of claim 1 , wherein the fumed alumina has an average particle size of about 75 to about 125 nm, the alpha alumina has an average particle size of about 250 to about 500 nm, and the silica has an average particle size of about 25 to about 100 nm.
3. The polishing composition of claim 1 , wherein the nonionic surfactant is a copolymer surfactant comprising siloxane units, ethylene oxide units, and propylene oxide units.
4. The polishing composition of claim 1 , wherein the polishing composition comprises about 50 to about 150 ppm of the nonionic surfactant.
5. The polishing composition of claim 1 , wherein the polishing composition comprises about 1 to about 3 wt. % of hydrogen peroxide.
6. The polishing composition of claim 1 , wherein the polishing composition has a pH of about 2 to about 5.
7. The polishing composition of claim 6 , wherein the polishing composition has a pH of about 2 to about 4.
8. A method of chemically-mechanically polishing a substrate comprising:
(i) contacting a substrate with a polishing pad and a chemical-mechanical polishing composition consisting essentially of:
(a) about 0.2 to about 1 wt. % of fumed alumina,
(b) about 0.1 to about 1 wt. % of alpha alumina,
(c) about 0.1 to about 4 wt. % of silica,
(d) about 10 to about 1000 ppm of a nonionic surfactant,
(e) at least 0.8 wt. % to about 1.5 wt. % of an additive compound selected from the group consisting of glycine, alanine, iminodiacetic acid, and maleic acid,
(f) hydrogen peroxide,
(g) optionally a biocide, and
(h) water,
(ii) moving the polishing pad and the polishing composition relative to the substrate, and
(iii) abrading at least a portion of the substrate to polish the substrate.
9. The method of claim 8 , wherein the fumed alumina has an average particle size of about 75 to about 125 nm, the alpha alumina has an average particle size of about 250 to about 500 nm, and the silica has an average particle size of about 25 to about 100 nm.
10. The method of claim 8 , wherein the nonionic surfactant is a copolymer surfactant comprising siloxane units, ethylene oxide units, and propylene oxide units.
11. The method of claim 8 , wherein the polishing composition comprises about 50 to about 150 ppm of the nonionic surfactant.
12. The method of claim 8 , wherein the polishing composition comprises about 1 to about 3 wt. % of hydrogen peroxide.
13. The method of claim 8 , wherein the polishing composition has a pH of about 2 to about 5.
14. The method of claim 13 , wherein the polishing composition has a pH of about 2 to about 4.
15. The method of claim 8 , wherein the substrate comprises nickel-phosphorous-coated aluminum, and at least a portion of the nickel-phosphorous is abraded to polish the substrate.
16. A chemical-mechanical polishing composition consisting essentially of:
(a) about 0.2 to about 1 wt. % of fumed alumina,
(b) about 0.1 to about 1 wt. % of alpha alumina,
(c) about 0.1 to about 4 wt. % of silica,
(d) about 10 to about 1000 ppm of a nonionic surfactant,
(e) at least 0.8 wt. % to about 1.5 wt. % of alanine,
(f) hydrogen peroxide,
(g) optionally a biocide, and
(h) water.
17. The polishing composition of claim 16 , wherein the fumed alumina has an average particle size of about 75 to about 125 nm, the alpha alumina has an average particle size of about 250 to about 500 nm, and the silica has an average particle size of about 25 to about 100 nm.
18. The polishing composition of claim 16 , wherein the nonionic surfactant is a copolymer surfactant comprising siloxane units, ethylene oxide units, and propylene oxide units.
19. The polishing composition of claim 16 , wherein the polishing composition comprises about 50 to about 150 ppm of the nonionic surfactant.
20. The polishing composition of claim 16 , wherein the polishing composition comprises about 1 to about 3 wt. % of hydrogen peroxide.
21. The polishing composition of claim 16 , wherein the polishing composition has a pH of about 2 to about 5.
22. The polishing composition of claim 21 , wherein the polishing composition has a pH of about 2 to about 4.