Patent Assignment
Reel/Frame 060615/0001
SECURITY INTEREST
Recorded: 2022-07-08
Received: 2022-07-08
Pages: 36
Assignors
CMC MATERIALS, INC.
Executed: 2022-07-06
INTERNATIONAL TEST SOLUTIONS, LLC
Executed: 2022-07-06
QED TECHNOLOGIES INTERNATIONAL, INC.
Executed: 2022-07-06
Assignee
MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
1300 THAMES STREET, 4TH FLOOR, THAMES STREET WHARF, BALTIMORE, MD, 21231, UNITED STATES
Covered Applications
(100)
HIGH REMOVAL RATE MAGNETORHEOLOGICAL FINISHING HEAD
App. No. 17/640,234
→
SILICON CARBONITRIDE POLISHING COMPOSITION AND METHOD
App. No. 17/592,612
→
CERIA-BASED SLURRY COMPOSITIONS FOR SELECTIVE AND NONSELECTIVE CMP OF SILICON OXIDE, SILICON NITRIDE, AND POLYSILICON
App. No. 17/592,294
→
CERIA-BASED SLURRY COMPOSITIONS FOR SELECTIVE AND NONSELECTIVE CMP OF SILICON OXIDE, SILICON NITRIDE, AND POLYSILICON
App. No. 17/592,279
→
COMPOSITION AND METHOD FOR POLISHING BORON DOPED POLYSILICON
App. No. 17/584,532
→
ENDPOINT WINDOW WITH CONTROLLED TEXTURE SURFACE
App. No. 17/582,667
→
CHEMICAL-MECHANICAL POLISHING SUBPAD HAVING POROGENS WITH POLYMERIC SHELLS
App. No. 17/557,461
→
SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR HIGH TOPOLOGICAL SELECTIVITY
App. No. 17/557,412
→
CHEMICAL-MECHANICAL POLISHING COMPOSITION, RINSE COMPOSITION, CHEMICAL-MECHANICAL POLISHING METHOD, AND RINSING METHOD
App. No. 17/620,181
→
SYSTEM AND METHOD FOR CLEANING CONTACT ELEMENTS AND SUPPORT HARDWARE USING FUNCTIONALIZED SURFACE MICROFEATURES
App. No. 17/540,943
→
CHEMICAL-MECHANICAL POLISHING PAD WITH TEXTURED PLATEN ADHESIVE
App. No. 17/607,743
→
UV-CURABLE RESINS USED FOR CHEMICAL MECHANICAL POLISHING PADS
App. No. 17/503,422
→
CHEMICAL MECHANICAL PLANARIZATION PAD WITH A RELEASE LINER COMPRISING A PULL TAB
App. No. 17/478,690
→
SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF CARBON-BASED FILMS
App. No. 17/474,543
→
TITANIUM DIOXIDE CONTAINING RUTHENIUM CHEMICAL MECHANICAL POLISHING SLURRY
App. No. 17/391,674
→
CMP COMPOSITION INCLUDING ANIONIC AND CATIONIC INHIBITORS
App. No. 17/384,940
→
SILICON WAFER POLISHING COMPOSITION AND METHOD
App. No. 17/379,279
→
CMP COMPOSITION INCLUDING A NOVEL ABRASIVE
App. No. 17/217,097
→
CHEMICAL-MECHANICAL POLISHING COMPOSITION, RINSE COMPOSITION, CHEMICAL-MECHANICAL POLISHING METHOD, AND RINSING METHOD
App. No. 17/260,106
→
DERIVATIZED POLYAMINO ACIDS
App. No. 17/123,295
→
COMPOSITION AND METHOD FOR DIELECTRIC CMP
App. No. 17/077,155
→
COMPOSITION AND METHOD FOR SELECTIVE OXIDE CMP
App. No. 17/077,485
→
POLISHING COMPOSITION AND METHOD WITH HIGH SELECTIVITY FOR SILICON NITRIDE AND POLYSILICON OVER SILICON OXIDE
App. No. 17/076,989
→
COMPOSITION AND METHOD FOR SILICON OXIDE AND CARBON DOPED SILICON OXIDE CMP
App. No. 17/077,295
→
COMPOSITION AND METHOD FOR DIELECTRIC CMP
App. No. 17/077,070
→
SELF-STOPPING POLISHING COMPOSITION AND METHOD
App. No. 17/077,414
→
COMPOSITION AND METHOD FOR POLYSILICON CMP
App. No. 17/009,961
→
POLISHING PAD EMPLOYING POLYAMINE AND CYCLOHEXANEDIMETHANOL CURATIVES
App. No. 16/923,688
→
SOLID POLYMER ELECTROLYTE COMPOSITIONS AND METHODS OF PREPARING SAME
App. No. 16/895,714
→
Wafer Manufacturing Cleaning Apparatus, Process And Method Of Use
App. No. 16/895,106
→
SECONDARY BATTERY CELL WITH SOLID POLYMER ELECTROLYTE
App. No. 16/895,769
→
DEVICE AND METHOD FOR THERMAL STABILIZATION OF PROBE ELEMENTS USING A HEAT CONDUCTING WAFER
App. No. 16/872,292
→
CHEMICAL MECHANICAL PLANARIZATION PADS WITH CONSTANT GROOVE VOLUME
App. No. 16/868,755
→
CHEMICAL MECHANICAL PLANARIZATION PADS VIA VAT-BASED PRODUCTION
App. No. 16/868,965
→
SYSTEM AND METHOD FOR CLEANING WIRE BONDING MACHINES USING FUNCTIONALIZED SURFACE MICROFEATURES
App. No. 16/855,841
→
SURFACE COATED ABRASIVE PARTICLES FOR TUNGSTEN BUFF APPLICATIONS
App. No. 16/849,021
→
ADDITIVES TO IMPROVE PARTICLE DISPERSION FOR CMP SLURRY
App. No. 16/826,409
→
SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANARIZATION
App. No. 16/797,438
→
PICK AND PLACE MACHINE CLEANING SYSTEM AND METHOD
App. No. 16/794,068
→
DUAL ADDITIVE COMPOSITION FOR POLISHING MEMORY HARD DISKS EXHIBITING EDGE ROLL OFF
App. No. 16/729,905
→
OXIDIZER FREE SLURRY FOR RUTHENIUM CMP
App. No. 16/706,991
→
SYSTEM AND METHOD FOR CLEANING CONTACT ELEMENTS AND SUPPORT HARDWARE USING FUNCTIONALIZED SURFACE MICROFEATURES
App. No. 16/684,453
→
POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE
App. No. 16/664,235
→
METHOD TO INCREASE BARRIER FILM REMOVAL RATE IN BULK TUNGSTEN SLURRY
App. No. 16/513,404
→
PICK AND PLACE MACHINE CLEANING SYSTEM AND METHOD
App. No. 16/460,918
→
PICK AND PLACE MACHINE CLEANING SYSTEM AND METHOD
App. No. 16/460,929
→
PICK AND PLACE MACHINE CLEANING SYSTEM AND METHOD
App. No. 16/460,935
→
PICK AND PLACE MACHINE CLEANING SYSTEM AND METHOD
App. No. 16/460,877
→
COMPOSITION AND METHOD FOR POLISHING SILICON CARBIDE
App. No. 16/389,097
→
WORKING SURFACE CLEANING SYSTEM AND METHOD
App. No. 16/290,789
→
NOVEL MATERIAL AND HARDWARE TO AUTOMATICALLY CLEAN FLEXIBLE ELECTRONIC WEB ROLLS
App. No. 16/283,592
→
NOVEL MATERIAL AND HARDWARE TO AUTOMATICALLY CLEAN FLEXIBLE ELECTRONIC WEB ROLLS
App. No. 16/283,603
→
NOVEL MATERIAL AND HARDWARE TO AUTOMATICALLY CLEAN FLEXIBLE ELECTRONIC WEB ROLLS
App. No. 16/283,613
→
NOVEL MATERIAL AND HARDWARE TO AUTOMATICALLY CLEAN FLEXIBLE ELECTRONIC WEB ROLLS
App. No. 16/283,607
→
SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANARIZATION
App. No. 16/271,508
→
COMPOSITION FOR TUNGSTEN CMP
App. No. 16/236,962
→
COMPOSITION AND METHOD FOR SILICON NITRIDE CMP
App. No. 16/208,779
→
COMPOSITION AND METHOD FOR COPPER BARRIER CMP
App. No. 16/208,797
→
COMPOSITION AND METHOD FOR COBALT CMP
App. No. 16/208,703
→
COMPOSITION AND METHOD FOR METAL CMP
App. No. 16/208,742
→
Wafer Manufacturing Cleaning Apparatus, Process And Method Of Use
App. No. 16/136,965
→
COMPOSITION FOR TUNGSTEN CMP
App. No. 16/131,180
→
METHODS AND COMPOSITIONS FOR PROCESSING DIELECTRIC SUBSTRATE
App. No. 16/018,281
→
COMPOSITION AND METHOD FOR POLISHING MEMORY HARD DISKS EXHIBITING REDUCED EDGE ROLL OFF
App. No. 16/000,062
→
CHEMICAL-MECHANICAL PROCESSING SLURRY AND METHODS FOR PROCESSING A NICKEL SUBSTRATE SURFACE
App. No. 15/951,598
→
CHEMICAL-MECHANICAL PROCESSING SLURRY AND METHODS
App. No. 15/951,358
→
SELF-STOPPING POLISHING COMPOSITION AND METHOD FOR BULK OXIDE PLANARIZATION
App. No. 15/934,219
→
CMP COMPOSITIONS CONTAINING POLYMER COMPLEXES AND AGENTS FOR STI APPLICATIONS
App. No. 15/920,813
→
COATED COMPRESSIVE SUBPAD FOR CHEMICAL MECHANICAL POLISHING
App. No. 15/875,773
→
TUNGSTEN BULK POLISHING METHOD WITH IMPROVED TOPOGRAPHY
App. No. 15/866,008
→
TUNGSTEN BUFF POLISHING COMPOSITIONS WITH IMPROVED TOPOGRAPHY
App. No. 15/864,720
→
COMPOSITION AND METHOD FOR REMOVING RESIDUE FROM CHEMICAL-MECHANICAL PLANARIZATION SUBSTRATE
App. No. 15/825,305
→
WORKING SURFACE CLEANING SYSTEM AND METHOD
App. No. 15/818,386
→
COMPOSITION AND METHOD FOR POLISHING MEMORY HARD DISKS EXHIBITING REDUCED SURFACE SCRATCHING
App. No. 15/817,959
→
CMP COMPOSITIONS SELECTIVE FOR OXIDE AND NITRIDE WITH IMPROVED DISHING AND PATTERN SELECTIVITY
App. No. 15/784,949
→
SURFACE TREATED ABRASIVE PARTICLES FOR TUNGSTEN BUFF APPLICATIONS
App. No. 15/723,886
→
SEMICONDUCTOR WIRE BONDING MACHINE CLEANING DEVICE AND METHOD
App. No. 15/723,151
→
NITRIDE INHIBITORS FOR HIGH SELECTIVITY OF TiN-SiN CMP APPLICATIONS
App. No. 15/706,192
→
SYSTEMS FOR MIXING A LIQUID AND RELATED METHODS
App. No. 15/684,470
→
ALTERNATIVE OXIDIZING AGENTS FOR COBALT CMP
App. No. 15/649,378
→
POLISHING COMPOSITION COMPRISING AN AMINE-CONTAINING SURFACTANT
App. No. 15/629,487
→
CHEMICAL-MECHANICAL PROCESSING SLURRY AND METHODS FOR PROCESSING A NICKEL SUBSTRATE SURFACE
App. No. 15/615,591
→
COBALT POLISHING ACCELERATORS
App. No. 15/603,634
→
SEMICONDUCTOR WIRE BONDING MACHINE CLEANING DEVICE AND METHOD
App. No. 15/495,873
→
POLISHING PAD HAVING POLISHING SURFACE WITH CONTINUOUS PROTRUSIONS
App. No. 15/479,779
→
METHOD OF POLISHING GROUP III-V MATERIALS
App. No. 15/433,068
→
Wafer Manufacturing Cleaning Apparatus, Process And Method Of Use
App. No. 15/419,840
→
POLISHING COMPOSITION COMPRISING CATIONIC POLYMER ADDITIVE
App. No. 15/414,786
→
CLEANING COMPOSITION FOLLOWING CMP AND METHODS RELATED THERETO
App. No. 15/327,326
→
COMPOSITION AND METHOD FOR POLISHING SILICON CARBIDE
App. No. 15/398,933
→
CMP PROCESSING COMPOSITION COMPRISING ALKYLAMINE AND CYCLODEXTRIN
App. No. 15/394,090
→
POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE
App. No. 15/346,835
→
POLISHING COMPOSITION CONTAINING CERIA ABRASIVE
App. No. 15/338,724
→
POLYURETHANE CMP PADS HAVING A HIGH MODULUS RATIO
App. No. 15/273,855
→
SLURRY COMPOSITION AND METHOD FOR POLISHING SUBSTRATE
App. No. 15/126,543
→
METHODS AND COMPOSITIONS FOR PROCESSING DIELECTRIC SUBSTRATE
App. No. 15/207,973
→
CMP COMPOSITION AND METHOD FOR POLISHING RIGID DISKS
App. No. 15/091,275
→
POLISHING COMPOSITION CONTAINING CERIA PARTICLES AND METHOD OF USE
App. No. 15/056,198
→
CUSTOMIZED POLISHING PADS FOR CMP AND METHODS OF FABRICATION AND USE THEREOF
App. No. 15/042,777
→
CLEANING COMPOSITION AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS AFTER CMP
App. No. 14/993,837
→