Chemical-mechanical polishing composition, rinse composition, chemical- mechanical polishing method, and rinsing method
Provided is a chemical-mechanical polishing composition comprising an abrasive, a basic component, at least one compound selected from the group consisting of a quaternary polyammonium salt, a quaternary ammonium salt having 6 or more carbon atoms, and an alkylated polymer having an amide structure, and an aqueous carrier; a rinse composition comprising the at least one compound and an aqueous carrier, as well as a method of chemically-mechanically polishing a substrate, and a method of rinsing a substrate, in which the respective compositions are used.
1. A chemical-mechanical polishing composition, comprising:
an abrasive,
a basic component,
at least one compound selected from the group consisting of a quaternary polyammonium salt, and a quaternary ammonium salt having 6 or more carbon atoms, and
an aqueous carrier,
wherein the quaternary ammonium salt having 6 or more carbon atoms has following general formula (2):
wherein R 7 , R 8 and R 9 are independently a substituted or unsubstituted, linear or branched alkyl group having 1 to 6 carbon atoms, or a benzyl group, R 10 is a substituted or unsubstituted, linear or branched alkyl group having 7 to 30 carbon atoms, and Y— is a counterion, or
a cation moiety selected from the group consisting of a methyltriethylammonium ion, a methyltripropylammonium ion, a methyltributylammonium ion, a methyltripentylammonium ion, a methyltrihexylammonium ion, an ethyltripropylammonium ion, an ethyltributylammonium ion, an ethyltripentylammonium ion, an ethyltrihexylammonium ion, a diethyldimethylammonium ion, a propyltrimethylammonium ion, a propyltriethylammonium ion, a propyltributylammonium ion, a propyltripentylammonium ion, a propyltrihexylammonium ion, a dipropyldimethylammonium ion, a dipropyldiethylammonium ion, a butyltrimethylammonium ion, a butyltriethylammonium ion, a butyltripropylammonium ion, a butyltripentylammonium ion, a butyltrihexylammonium ion, a dibutyldimethylammonium ion, a dibutyldiethylammonium ion, a dibutyldipropylammonium ion, a pentyltrimethylammonium ion, a pentyltriethylammonium ion, a pentyltripropylammonium ion, a pentyltributylammonium ion, a pentyltrihexylammonium ion, a dipentyldimethylammonium ion, a dipentyldiethylammonium ion, a dipentyldipropylammonium ion, a dipentyldibutylammonium ion, a hexyltrimethylammonium ion, a hexyltriethylammonium ion, a hexyltripropylammonium ion, a hexyltributylammonium ion, a hexyltripentylammonium ion, a dihexyldimethylammonium ion, a dihexyldiethylammonium ion, a dihexyldipropylammonium ion, a dihexyldibutylammonium ion, a dihexyldipentylammonium ion, a benzylethyldimethylammonium ion, a benzyltriethylammonium ion, a benzyltripropylammonium ion, a benzyltributylammonium ion, a benzyltripentylammonium ion, and a benzyltrihexylammonium ion, and
wherein the chemical-mechanical polishing composition has a pH of 7 to 12.
2. The chemical-mechanical polishing composition of claim 1 , wherein the at least one compound comprises the quaternary polyammonium salt, and the quaternary ammonium salt having 6 or more carbon atoms.
3. The chemical-mechanical polishing composition of claim 1 , wherein the at least one compound comprises the quaternary polyammonium salt, wherein the quaternary polyammonium salt has following general formula (1):
wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are independently a substituted or unsubstituted, linear or branched alkyl group having 1 to 6 carbon atoms, A is independently a substituted or unsubstituted, linear or branched alkylene group having 1 to 30 carbon atoms, n is an integer of 1 to 10, and X— is a counterion.
4. The chemical-mechanical polishing composition of claim 3 , wherein the quaternary polyammonium salt is a quaternary diammonium salt, and wherein in the general formula (1), A is a substituted or unsubstituted, linear or branched alkylene group having 1 to 15 carbon atoms, and n is 1.
5. The chemical-mechanical polishing composition of claim 1 , wherein the at least one compound comprises the quaternary ammonium salt having 6 or more carbon atoms.
6. The chemical-mechanical polishing composition of claim 1 , further comprising an alkylated polymer having an amide structure.
7. The chemical-mechanical polishing composition of claim 1 , further comprising tetramethylammonium hydroxide.
8. The chemical-mechanical polishing composition of claim 1 , further comprising a water-soluble polymer different from an alkylated polymer having an amide structure.
9. The chemical-mechanical polishing composition of claim 8 , wherein the water-soluble polymer comprises at least one selected from the group consisting of polyvinylpyrrolidone, polyvinylacetamide, a cellulose derivative, and a polymer containing a polyvinyl alcohol structural unit.
10. A rinse composition, comprising:
at least one compound selected from the group consisting of a quaternary polyammonium salt, and a quaternary ammonium salt having 6 or more carbon atoms, an aqueous carrier, and
a water-soluble polymer comprising at least one selected from the group consisting of polyvinylacetamide, a cellulose derivative, and a polymer containing a polyvinyl alcohol structural unit in a main chain or side chain of the polymer,
wherein the quaternary ammonium salt having 6 or more carbon atoms has following general formula (2):
wherein R 7 , R 8 and R 9 are independently a substituted or unsubstituted, linear or branched alkyl group having 1 to 6 carbon atoms, or a benzyl group, R 10 is a substituted or unsubstituted, linear or branched alkyl group having 7 to 30 carbon atoms, and Y— is a counterion, or
a cation moiety selected from the group consisting of a methyltriethylammonium ion, a methyltripropylammonium ion, a methyltributylammonium ion, a methyltripentylammonium ion, a methyltrihexylammonium ion, an ethyltripropylammonium ion, an ethyltributylammonium ion, an ethyltripentylammonium ion, an ethyltrihexylammonium ion, a diethyldimethylammonium ion, a propyltrimethylammonium ion, a propyltriethylammonium ion, a propyltributylammonium ion, a propyltripentylammonium ion, a propyltrihexylammonium ion, a dipropyldimethylammonium ion, a dipropyldiethylammonium ion, a butyltrimethylammonium ion, a butyltriethylammonium ion, a butyltripropylammonium ion, a butyltripentylammonium ion, a butyltrihexylammonium ion, a dibutyldimethylammonium ion, a dibutyldiethylammonium ion, a dibutyldipropylammonium ion, a pentyltrimethylammonium ion, a pentyltriethylammonium ion, a pentyltripropylammonium ion, a pentyltributylammonium ion, a pentyltrihexylammonium ion, a dipentyldimethylammonium ion, a dipentyldiethylammonium ion, a dipentyldipropylammonium ion, a dipentyldibutylammonium ion, a hexyltrimethylammonium ion, a hexyltriethylammonium ion, a hexyltripropylammonium ion, a hexyltributylammonium ion, a hexyltripentylammonium ion, a dihexyldimethylammonium ion, a dihexyldiethylammonium ion, a dihexyldipropylammonium ion, a dihexyldibutylammonium ion, a dihexyldipentylammonium ion, a benzylethyldimethylammonium ion, a benzyltriethylammonium ion, a benzyltripropylammonium ion, a benzyltributylammonium ion, a benzyltripentylammonium ion, and a benzyltrihexylammonium ion.
11. The rinse composition of claim 10 , wherein the at least one compound comprises the quaternary polyammonium salt, and the quaternary ammonium salt having 6 or more carbon atoms.
12. The rinse composition of claim 10 , wherein the at least one compound comprises the quaternary polyammonium salt, wherein the quaternary polyammonium salt has following general formula (1):
wherein R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are independently a substituted or unsubstituted, linear or branched alkyl group having 1 to 6 carbon atoms, A is independently a substituted or unsubstituted, linear or branched alkylene group having 1 to 30 carbon atoms, n is an integer of 1 to 10, and X— is a counterion.
13. The rinse composition of claim 12 , wherein the quaternary polyammonium salt is a quaternary diammonium salt, and wherein in the general formula (1), A is a substituted or unsubstituted, linear or branched alkylene group having 1 to 15 carbon atoms, and n is 1.
14. The rinse composition of claim 10 , wherein the at least one compound comprises the quaternary ammonium salt having 6 or more carbon atoms.
15. The rinse composition of claim 10 , further comprising an alkylated polymer having an amide structure.
16. The rinse composition of claim 10 , further comprising tetramethylammonium hydroxide.
17. The chemical-mechanical polishing composition of claim 4 , wherein the quaternary polyammonium salt is hexamethylenebis(trimethylammonium chloride).
18. The chemical-mechanical polishing composition of claim 5 , wherein the quaternary ammonium salt having 6 or more carbon atoms has a cation moiety of a methyltributylammonium ion.
19. The rinse composition of claim 13 , wherein the quaternary polyammonium salt is hexamethylenebis(trimethylammonium chloride).
20. The rinse composition of claim 14 , wherein the quaternary ammonium salt having 6 or more carbon atoms has a cation moiety of a methyltributylammonium ion.
21. The chemical-mechanical polishing composition of claim 6 , wherein the alkylated polymer having an amide structure is an alkylated polyvinylpyrrolidone.
22. The rinse composition of claim 15 , wherein the alkylated polymer having an amide structure is an alkylated polyvinylpyrrolidone.