Alternative oxidizing agents for cobalt CMP
The invention provides a chemical-mechanical polishing composition comprising (a) an abrasive, (b) a cobalt accelerator, and (c) an oxidizing agent that oxidizes a metal, wherein the polishing composition has a pH of about 4 to about 10. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.
1. A chemical-mechanical polishing composition comprising:
(a) an abrasive, wherein the abrasive is silica;
(b) a cobalt accelerator, wherein the cobalt accelerator is present in the polishing composition at a concentration of about 5 mM to about 100 mM;
(c) an oxidizing agent that oxidizes cobalt, wherein the oxidizing agent is selected from a heteroaryl nitro compound, a heteroaryl nitroso compound, a heteroaryl N-oxide compound, a heteroaryl hydroxylamine compound, a heteroaryl oxime compound, and combinations thereof,
wherein the polishing composition has a pH of about 4 to about 10.
2. The polishing composition of claim 1 , wherein the polishing composition further comprises a cobalt corrosion inhibitor.
3. The polishing composition of claim 1 , wherein the cobalt accelerator is present in the polishing composition at a concentration of about 10 mM to about 50 mM.
4. The polishing composition of claim 1 , wherein the cobalt accelerator is selected from an N-di(carboxylalkyl)amine, an N-di(hydroxyalkyl)amine, an N,N-di(hydroxyalkyl)-N-carboxylalkylamine, a dicarboxyheterocycle, a heterocyclylalkyl-α-amino acid, an N-aminoalkylamino acid, an unsubstituted heterocycle, an alkyl-substituted heterocycle, a carboxylic acid, a dicarboxylic acid, a tricarboxylic acid, an alkylamine, an N-aminoalkyl-α-amino acid, and combinations thereof.
5. The polishing composition of claim 4 , wherein the cobalt accelerator is selected from iminodiacetic acid, N-(2-acetamido)iminodiacetic acid, N-methylimidazole, picolinic acid, dipicolinic acid, 4-(2-hydroxyethyl)-1-piperazineethanesulfonic acid, glycine, bicine, triethylamine, etidronic acid, N-methylmorpholine, malonic acid, 2-pyridinesulfonate, citric acid and combinations thereof.
6. The polishing composition of claim 1 , wherein the polishing composition comprises about 0.1 wt. % to about 5 wt. % of the abrasive.
7. The polishing composition of claim 6 , wherein the polishing composition comprises about 0.1 wt. % to about 3 wt. % of the abrasive.
8. The polishing composition of claim 1 , wherein the oxidizing agent is present in the polishing composition at a concentration of about 1 mM to about 100 mM.
9. The polishing composition of claim 8 , wherein the oxidizing agent is present in the polishing composition at a concentration of about 10 mM to about 50 mM.
10. The polishing composition of claim 1 , wherein the polishing composition has a pH of about 5 to about 9.
11. The polishing composition of claim 10 , wherein the polishing composition has a pH of about 6.5 to about 7.5.