Granted Patent
Utility
US 6,589,100
· Confirmation No. 9358
RARE EARTH SALT/OXIDIZER-BASED CMP METHOD
Inventors
Attorneys & Agents of Record
Classification
USPC
451/41
H10P52/403
C09G1/02
C09K3/1463
Prosecution
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- Customer No.
- 29050
- Docket No.
- 100022
- Confirmation No.
- 9358
Publication
- Pub. No.
- US20030060135A1
- Pub. Date
- 2003-03-27
Patent Term Adjustment
-120days
CABOT MICROELECTRONICS CORPORATION,
QED TECHNOLOGIES INTERNATIONAL, INC.,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
KMG-BERNUTH, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
SEALWELD (USA), INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
CMC MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2022-07-06
RELEASE OF SECURITY INTEREST
Recorded 2018-11-16
from
CABOT MICROELECTRONICS CORPORATION,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY AGREEMENT
Recorded 2018-11-16
NOTICE OF SECURITY INTEREST IN PATENTS
Recorded 2012-02-16
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-11-13
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Quick Facts
- Patent No.
- US 6,589,100
- App. No.
- 09/961,934
- Filed
- 2001-09-24
- Granted
- 2003-07-08
- Pub. No.
- US20030060135A1
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- PTA
- -120 days
External Links