IP Library Granted Patent US 8,425,639
Granted Patent B2
US 8,425,639 · App. 12/476,073 · Granted Apr 23, 2013

Wire saw slurry recycling process

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,425,639
App. No.
12/476,073
Granted
Apr 23, 2013
Kind
B2
Abstract

The present invention provides a method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in a water-based carrier. The method comprises the steps of (a) separating the waste fluid into a first fraction and a second fraction, the first fraction comprising recovered abrasive particles, and the second fraction comprising waste solids and a portion of the water-based carrier; (b) optionally, separating the second fraction to separate the waste solids from the water-based carrier to form a waste solids portion and a recovered water-based carrier portion; (c) optionally, drying the first fraction from step (a) and separating the resulting dried abrasive particles from smaller waste particles to produce a purified recovered abrasive fraction; and (d) suspending particles of the first fraction from step (a), the purified recovered abrasive fraction from step (c), or both, in a suspending medium comprising at least a portion of the recovered water-based carrier from step (b), to generate a recycled water-based wire saw cutting slurry.

Claims (12)

1. A method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in an aqueous carrier, the process comprising the steps of:

(a) providing the water-based wire saw cutting slurry waste fluid, wherein the aqueous carrier has a water content of about 75 wt. % or greater, a polymer having an average molecular weight of greater than about 2000 Da, and free of at least one preconditioning agent selected from the group consisting of oxidizing agents, pH adjusters, coagulants, and surfactants;

(b) separating the water-based wire saw cutting slurry waste fluid into a first fraction and a second fraction, the first fraction being enhanced for the abrasive particles, and the second fraction being enhanced for the waste solids and said water-based carrier;

(c) optionally, separating the second fraction from step (b) to form a waste solids portion and a recovered water-based carrier portion; and

(d) suspending particles from the first fraction of step (b) in an aqueous suspending medium to generate a recycled water-based wire saw cutting slurry, wherein the process further comprises a preconditioning step prior to step (b), the preconditioning step comprising adding at least one preconditioning agent selected from the group consisting of oxidizing agents, pH adjusters, coagulants, and surfactants to the waste fluid.

2. The method of claim 1 , wherein the aqueous suspending medium comprises at least a portion of the recovered water-based carrier portion from step (c).

3. The method of claim 1 , wherein step (b) is performed using at least one device selected from the group consisting of a filtration unit, a centrifuge, a battery of centrifuges, a hydrocyclone, and a battery of hydrocyclones.

4. The method of claim 1 , wherein the water-based wire saw cutting slurry waste fluid is diluted with water prior to step (a).

5. The method of claim 1 , wherein the abrasive particles comprise particles selected from the group consisting of silicon carbide, diamond and boron carbide.

6. The method of claim 1 , including the additional step of drying the first fraction from step (b) and separating the resulting dried abrasive particles from smaller waste particles to produce a purified recovered abrasive fraction; and suspending at least a portion of the purified recovered abrasive fraction in the aqueous suspending medium to generate the recycled water-based wire saw cutting slurry.

7. The method of claim 6 , wherein the dried abrasive particles are separated using one or more apparatus selected from the group consisting of a cyclone, a particle classifier, and a grinder classifier.

8. A recycled water-based cutting slurry prepared by the method of claim 1 .

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Nov 16, 2018
From: BANK OF AMERICA, N.A.
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 047587/0119 →
NOTICE OF SECURITY INTEREST IN PATENTS Recorded Feb 16, 2012
From: CABOT MICROELECTRONICS CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027727/0275 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2010
From: GAUDET, GREGORG; GRUMBINE, STEVEN; NAGUIB, NEVIN; BATLLO, FRANCOIS
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 023919/0897 →