Composition and method for polishing aluminum semiconductor substrates
View Patent ↗The invention provides a chemical-mechanical polishing composition comprising coated α-alumina particles, an organic carboxylic acid, and water. The invention also provides a chemical-mechanical polishing composition comprising an abrasive having a negative zeta potential in the polishing composition, an organic carboxylic acid, at least one alkyldiphenyloxide disulfonate surfactant, and water, wherein the polishing composition does not further comprise a heterocyclic compound. The abrasive is colloidally stable in the polishing composition. The invention further provides methods of polishing a substrate with the aforesaid polishing compositions.
1. A method of chemically-mechanically polishing a substrate, which method comprises:
(i) providing a substrate comprising at least one layer of aluminum,
(ii) providing a polishing pad,
(iii) providing a polishing composition comprising:
(a) an abrasive consisting of α-alumina particles, wherein the α-alumina particles are coated with a copolymer comprising at least one sulfonate monomer and at least one monomer selected from the group consisting of carboxylate monomers, phosphonate monomers, and phosphate monomers,
(b) a complexing agent for aluminum, and
(c) water,
(iv) contacting a surface of the substrate with the polishing pad and the polishing composition, and
(v) abrading at least a portion of the surface of the substrate to remove at least some aluminum from the surface of the substrate and to polish the surface of the substrate,
wherein the polishing composition has a pH of about 1 to about 6, and wherein the abrasive is colloidally stable in the polishing composition.
2. The method of claim 1 , wherein the copolymer comprises a combination of at least one sulfonate monomer and at least one carboxylate monomer.
3. The method of claim 2 , wherein at least one carboxylate monomer comprises at least one acrylate monomer.
4. The method of claim 1 , wherein the complexing agent for aluminum comprises an organic carboxylic acid.
5. The method of claim 4 , wherein the organic carboxylic acid is selected from the group consisting of malonic acid, phthalic acid, lactic acid, tartaric acid, gluconic acid, citric acid, malic acid, glycolic acid, maleic acid, and combinations thereof.
6. The method of claim 1 , wherein the polishing composition further comprises an agent that oxidizes aluminum.
7. The method of claim 6 , wherein the agent that oxidizes aluminum is selected from the group consisting of hydrogen peroxide, organic peroxy acids, persulfate, nitrate, periodate, perbromate, bromate, ferric salts, and combinations thereof.
8. The method of claim 1 , wherein the polishing composition further comprises a surfactant.
9. The method of claim 8 , wherein the surfactant is an alkyldiphenyloxide disulfonate surfactant.
10. The method of claim 1 , wherein the substrate further comprises at least one layer selected from the group consisting of tungsten, titanium, titanium nitride, tantalum, and tantalum nitride.
11. A method of chemically-mechanically polishing a substrate, which method comprises:
(i) providing a substrate comprising at least one layer of aluminum,
(ii) providing a polishing pad,
(iii) providing a polishing composition comprising:
(a) an abrasive, wherein the abrasive comprises particles having a negative zeta potential in the polishing composition,
(b) a complexing agent for aluminum,
(c) at least one alkyldiphenyloxide disulfonate surfactant, and
(d) water,
(iv) contacting a surface of the substrate with the polishing pad and the polishing composition, and
(v) abrading at least a portion of the surface of the substrate to remove at least some aluminum from the surface of the substrate and to polish the surface of the substrate,
wherein the polishing composition has a pH of about 1 to about 6, and wherein the abrasive is colloidally stable in the polishing composition.
12. The method of claim 11 , wherein the abrasive is selected from the group consisting of wet process silica, fumed silica, and surface-coated α-alumina.
13. The method of claim 11 , wherein the complexing agent for aluminum comprises an organic carboxylic acid.
14. The method of claim 13 , wherein the organic carboxylic acid is selected from the group consisting of malonic acid, phthalic acid, lactic acid, tartaric acid, gluconic acid, citric acid, malic acid, glycolic acid, maleic acid, and combinations thereof.
15. The method of claim 11 , wherein the polishing composition further comprises an agent that oxidizes aluminum.
16. The method of claim 15 , wherein the agent that oxidizes aluminum is selected from the group consisting of hydrogen peroxide, organic peroxy acids, persulfate, nitrate, periodate, perbromate, bromate, ferric salts, and combinations thereof.