Oxidation-stabilized CMP compositions and methods
View Patent ↗The present invention provides a chemical-mechanical polishing (CMP) composition comprising an amino compound, a radical-forming oxidizing agent, a radical trapping agent capable of inhibiting radical-induced oxidation of the amino compound, and an aqueous carrier therefore. The radical trapping agent is a hydroxyl-substituted polyunsaturated cyclic compound, a nitrogenous compound, or a combination thereof. Optionally, the composition comprises a metal oxide abrasive (e.g., silica, alumina, titania, ceria, zirconia, or a combination of two or more of the foregoing abrasives).
1. A chemical-mechanical polishing (CMP) composition comprising:
(a) an amino compound;
(b) a radical-forming oxidizing agent;
(c) a radical trapping agent capable of inhibiting radical-induced oxidation of the amino compound, the radical trapping agent wherein the radical trapping agent comprises a nitrogenous compound selected from the group consisting of an aromatic nitro compound, a heteroaromatic nitro compound, an aliphatic nitro compound, a nitroso compound, a nitrogen free radical-type compound, an N-oxide compound, an N-hydroxyl-imine compound, an acylamino-substituted aromatic compound, an N-acyl-enamine compound, and a combination of two or more of the foregoing nitrogenous compounds; and
(d) an aqueous carrier therefor.
2. The CMP composition of claim 1 wherein the radical trapping agent comprises a hydroxyl-substituted polyunsaturated cyclic compound selected from the group consisting of a hydroquinone-type compound, a hydroxyl-substituted quinone compound, a hydroxyl-substituted coumarin compound, a hydroxyl-substituted naphthalene compound, an alkyloxy-substituted phenol compound, an alkyl-substituted phenol compound, a hydroxyl-substituted heteroaromatic compound, a sulfonic acid substituted phenolic compound, a salt thereof, and a combination of two or more of the foregoing compounds.
3. The CMP composition of claim 1 wherein the radical-forming oxidizing agent comprises at least one oxidizing agent selected from the group consisting of a peroxy compound and a halogen compound.
4. The CMP composition of claim 1 wherein the radical-forming oxidizing agent comprises hydrogen peroxide.
5. The CMP composition of claim 1 wherein the radical-forming oxidizing agent comprises a persulfate compound.
6. The CMP composition of claim 1 wherein the radical-forming oxidizing agent comprises iodine.
7. The CMP composition of claim 1 wherein the amino compound comprises at least one primary amine group, at least nitrogen-containing heterocyclic group, at least one quaternary ammonium group, or a combination of two or more of the foregoing.
8. The CMP composition of claim 1 wherein the composition further comprises a metal oxide abrasive.
9. The CMP composition of claim 8 wherein the metal oxide abrasive is selected from the group consisting of silica, alumina, titania, ceria, zirconia, and a combination of two or more of the foregoing abrasives.