Polyoxometalate compositions and methods
View Patent ↗The invention provides an isolated, particulate polyoxometalate complex comprising a water-soluble cationic polymer and a polyoxometalate compound ionically bound to the cationic polymer. The polyoxometalate compound can be an isopolyoxometalate compound, such as an isopolytungstate, or a heteropolyoxometalate compound. The invention further provides a chemical-mechanical polishing composition comprising a preformed polyoxometalate abrasive, as well as a method of chemically-mechanically polishing a substrate therewith.
1. An abrasive particle comprising a polyoxometalate complex and a metal oxide core, wherein the polyoxometalate complex is a polyoxometalate compound ionically bound to a cationic polymer, wherein the metal oxide core is surrounded by a coating comprising the polyoxometalate complex, and the mean particle size of the abrasive particle is in the range of about 100 nm to about 5000 nm, as determined by light scattering.
2. The abrasive particle of claim 1 wherein the polyoxometalate compound comprises an isopolyoxometalate compound.
3. The abrasive particle of claim 1 wherein the polyoxometalate compound comprises a heteropolyoxometalate compound.
4. The abrasive particle of claim 1 wherein the cationic polymer comprises a quaternary ammonium-substituted polymer.
5. The abrasive particle of claim 1 wherein the cationic polymer comprises poly(methacryloxyethyltrimethylammonium chloride).
6. The abrasive particle of claim 1 wherein the metal oxide core comprises silica.
7. Theabrasive particle of claim 1 wherein the polyoxometalate compound comprises an isopolytungstate compound.
8. The abrasive particle of claim 7 wherein the complex is free from tetraperoxotungstate as determined by FT-IR.
9. The abrasive particle of claim 7 wherein the cationic polymer comprises a water soluble quaternary ammonium polymer.
10. The abrasive particle of claim 1 wherein the polyoxometalate compound comprises a polytitanate compound.
11. The abrasive particle of claim 10 wherein the cationic polymer comprises a water soluble quaternary ammonium polymer.
12. A chemical-mechanical polishing (CMP) composition comprising:
(a) preformed abrasive particles comprising a polyoxometalate complex and a metal oxide core, wherein the polyoxometalate complex is a polyoxometalate compound ionically bound to a cationic polymer, wherein the metal oxide core is surrounded by a coating comprising the polyoxometalate complex, and the mean particle size of the abrasive particle is in the range of about 100 nm to about 5000 nm, as determined by light scattering; and
(b) one or more oxidizing agents suitable for use in CMP; and
(c) an aqueous carrier;
wherein the composition has a pH of about 3 or less.
13. The CMP composition of claim 12 wherein the metal oxide core comprises silica.
14. The CMP composition of claim 12 wherein the polyoxometalate compound comprises an isopolytungstate compound.
15. The CMP composition of claim 12 wherein the polyoxometalate compound comprises a polytitanate compound.
16. The CMP composition of claim 12 wherein the cationic polymer comprises a quaternary ammonium-substituted polymer.
17. The CMP composition of claim 12 wherein the abrasive particles are present in the composition in an amount in the range of about 0.01 to about 5 percent by weight.
18. The CMP composition of claim 12 further comprising an auxiliary abrasive selected from the group consisting of silica, alumina, titania, zirconia, and ceria.
19. A method for polishing a substrate comprising abrading a surface of the substrate with the abrasive particle of claim 1 .
20. A chemical-mechanical polishing (CMP) method for polishing a substrate, the method comprising the steps of:
(a) contacting a surface of a substrate with a polishing pad an aqueous CMP composition, the CMP composition having a pH of about 3 or less and including preformed abrasive particles comprising a polyoxometalate complex and a metal oxide core, wherein the polyoxometalate complex is a polyoxometalate compound ionically bound to a cationic polymer, wherein the metal oxide core is surrounded by a coating comprising the polyoxometalate complex, and the mean particle size of the abrasive particle is in the range of about 100 nm to about 5000 nm, as determined by light scattering; and
(b) causing relative motion between the polishing pad and the substrate while maintaining a portion of the CMP composition in contact with the surface between the pad and the substrate for a time period sufficient to abrade at least a portion of the surface.
21. The method of claim 20 wherein the metal oxide core comprises silica.
22. The method of claim 20 wherein the polyoxometalate compound comprises an isopolytungstate compound.
23. The method of claim 20 wherein the polyoxometalate compound comprises a polytitanatecompound.
24. The method of claim 20 wherein the cationic polymer comprises a quaternary ammonium-substituted polymer.
25. The method of claim 20 wherein the abrasive particles are present in the CMP composition in an amount of about 0.01 to about 5 percent by weight.
26. The method of claim 20 wherein the CMP composition further comprises an auxiliary abrasive selected from the group consisting of silica, alumina, titania, zirconia, and ceria.
27. The method of claim 20 wherein the CMP composition further comprises an oxidizing agent.