IP Library › Granted Patent US 6,620,037
Granted Patent Utility
US 6,620,037 · Confirmation No. 6671

CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES

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 Code Description Pages PDF
2004-02-25 C.AD Change of Address 1 View
2002-05-14 TRNA Transmittal of New Application 3 View
2002-05-14 ADS Application Data Sheet 2 View
2002-05-14 A.PE Preliminary Amendment 7 View
2002-05-14 SPEC Specification 26 View
2002-05-14 CLM Claims 5 View
2002-05-14 ABST Abstract 1 View
2002-05-14 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,620,037
App. No.
10/145,357
Filed
2002-05-14
Granted
2003-09-16
Pub. No.
US20020168923A1
Art Unit
3724
PTA
-29 days