IP Library › Patent Application 11937804
Patent Application Utility
App. No. 11/937,804 · Confirmation No. 2500

COMPOSITIONS AND METHODS FOR RUTHENIUM AND TANTALUM BARRIER CMP

Inventor: Shoutian Li
Abandoned -- After Examiner's Answer or Board of Appeals Decision View Publication ↗
⬇ PDF
 Code Description Pages PDF
2016-02-23 ABN Abandonment 2 View
2015-12-02 APDA Patent Board Decision - Examiner Affirmed 7 View
2013-11-14 AP_DK_M Appeal Docketing Notice 2 View
2013-10-15 APRB Reply Brief Filed 5 View
2013-10-15 TRAN.LET Transmittal Letter 1 View
2013-10-15 WFEE Fee Worksheet (SB06) 1 View
2013-08-23 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2013-08-15 APEA Examiner's Answer to Appeal Brief 6 View
2013-07-01 AP.B Appeal Brief Filed 15 View
2013-07-01 TRAN.LET Transmittal Letter 2 View
2013-05-03 N/AP Notice of Appeal Filed 1 View
2013-05-03 XT/ Extension of Time 1 View
2012-11-17 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2012-11-09 CTFR Final Rejection 7 View
2012-10-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-10-24 CLM Claims 4 View
2012-10-24 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2012-10-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-10-24 136A Authorization for Extension of Time all replies 1 View
2012-10-24 WFEE Fee Worksheet (SB06) 1 View
2012-08-11 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2012-08-03 CTNF Non-Final Rejection 6 View
2012-08-03 892 List of references cited by examiner 1 View
2012-06-22 RCEX Request for Continued Examination (RCE) 1 View
2012-06-22 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-06-22 CLM Claims 4 View
2012-06-22 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2012-06-22 AF/D Affidavit-submitted prior to Mar 15, 2013 2 View
2012-06-22 WFEE Fee Worksheet (SB06) 2 View
2012-06-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-06-22 WFEE Fee Worksheet (SB06) 1 View
2012-06-08 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2012-04-30 CTAV Advisory Action (PTOL-303) 3 View
2012-04-17 A.NE Response After Final Action 1 View
2012-04-17 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2012-04-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-04-17 136A Authorization for Extension of Time all replies 1 View
2012-04-17 WFEE Fee Worksheet (SB06) 1 View
2012-02-24 CTFR Final Rejection 9 View
2012-01-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-01-09 CLM Claims 4 View
2012-01-09 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2012-01-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-01-09 136A Authorization for Extension of Time all replies 1 View
2012-01-09 WFEE Fee Worksheet (SB06) 1 View
2011-10-20 CTNF Non-Final Rejection 10 View
2011-10-20 892 List of references cited by examiner 1 View
2011-07-19 AP.B Appeal Brief Filed 16 View
2011-07-19 WFEE Fee Worksheet (SB06) 2 View
2011-07-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-19 136A Authorization for Extension of Time all replies 2 View
2011-06-02 N/AP Notice of Appeal Filed 3 View
2011-06-02 WFEE Fee Worksheet (SB06) 2 View
2011-06-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-05-02 CTAV Advisory Action (PTOL-303) 3 View
2011-04-22 A.NE Response After Final Action 1 View
2011-04-22 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2011-04-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-04-22 136A Authorization for Extension of Time all replies 1 View
2011-03-02 CTFR Final Rejection 7 View
2010-12-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-12-09 CLM Claims 4 View
2010-12-09 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2010-12-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-12-09 TRAN.LET Transmittal Letter 1 View
2010-12-09 WFEE Fee Worksheet (SB06) 1 View
2010-09-09 CTNF Non-Final Rejection 6 View
2010-09-09 892 List of references cited by examiner 1 View
2010-09-09 1449 List of References cited by applicant and considered by examiner 1 View
2010-09-09 BIB Bibliographic Data Sheet 1 View
2010-07-28 ELC. Response to Election / Restriction Filed 1 View
2010-07-28 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2010-07-28 WFEE Fee Worksheet (SB06) 1 View
2010-07-08 CTRS Requirement for Restriction/Election 5 View
2009-05-14 NTC.PUB Notice of Publication 1 View
2007-12-03 APP.FILE.REC Filing Receipt 3 View
2007-11-09 TRNA Transmittal of New Application 2 View
2007-11-09 WFEE Fee Worksheet (SB06) 2 View
2007-11-09 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-11-09 SPEC Specification 26 View
2007-11-09 CLM Claims 4 View
2007-11-09 ABST Abstract 1 View
2007-11-09 DRW Drawings-only black and white line drawings 3 View
2007-11-09 ADS Application Data Sheet 3 View
2007-11-09 OATH Oath or Declaration filed 2 View
2007-11-09 136A Authorization for Extension of Time all replies 2 View
2007-11-09 TRAN.LET Transmittal Letter 4 View
2007-11-09 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2007-11-09 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
11/937,804
Filed
2007-11-09
Pub. No.
US20090124173A1
Art Unit
1716