IP Library Granted Patent US 6,682,575
Granted Patent Utility
US 6,682,575 · Confirmation No. 7950

METHANOL-CONTAINING SILICA-BASED CMP COMPOSITIONS

Inventor: Robert Vacassy
⬇ PDF
Code Description Pages PDF
2003-11-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-03-05 TRNA Transmittal of New Application 6 View
2002-03-05 ADS Application Data Sheet 3 View
2002-03-05 SPEC Specification 11 View
2002-03-05 CLM Claims 2 View
2002-03-05 ABST Abstract 1 View
2002-03-05 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,682,575
App. No.
10/092,406
Filed
2002-03-05
Granted
2004-01-27
Pub. No.
US20030168628A1
Art Unit
1755
PTA
-23 days