Patent Assignment
Reel/Frame 012459/0955
Assignment of Assignor's Interest
Recorded: 2001-12-28
Received: 2002-01-17
Pages: 2
Assignor
XU, CANGSHAN
Executed: 2001-12-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, PREMONT, CA, 94536, UNITED STATES
Covered Property
(1)
Grooved Rollers for a Linear Chemical Mechanical Planarization System
Application:
10/040,501 →