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App. No. 10/040,501 · Confirmation No. 2630

GROOVED ROLLERS FOR A LINEAR CHEMICAL MECHANICAL PLANARIZATION SYSTEM

Inventor: Cangshan Xu
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2003-06-30 A.NE Response After Final Action 1 View
2003-06-30 SPEC Specification 3 View
2003-06-30 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-06-30 DRW Drawings-only black and white line drawings 1 View
2003-06-30 LET. Miscellaneous Incoming Letter 1 View
2003-06-30 DRW Drawings-only black and white line drawings 8 View
2003-06-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-04-15 TRNA Transmittal of New Application 4 View
2002-04-15 DRW Drawings-only black and white line drawings 8 View
2002-04-15 OATH Oath or Declaration filed 2 View
2001-12-28 TRNA Transmittal of New Application 3 View
2001-12-28 SPEC Specification 22 View
2001-12-28 CLM Claims 6 View
2001-12-28 ABST Abstract 1 View
2001-12-28 DRW Drawings-only black and white line drawings 10 View
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Quick Facts
App. No.
10/040,501
Filed
2001-12-28
Granted
2003-09-16
Pub. No.
US20030139124A1
Art Unit
3723
PTA
-10 days