Patent Assignment
Reel/Frame 012461/0305
Assignment of Assignor's Interest
Recorded: 2002-01-09
Received: 2002-01-17
Pages: 2
Assignor
BAEK, KYE HYUN
Executed: 2001-12-10
Assignee
HYNIX SEMICONDUCTOR INC.
SAN 136-1, AMI-RI, BUBAL-EUB, ICHON-SHI, KYOUNGKI-DO, KRX, KOREA, REPUBLIC OF
Covered Property
(1)
Method for Minimizing Variation in Etch Rate of Semiconductor Wafer Caused by Variation in Mask Pattern Density
Application:
10/040,490 →