Patent Assignment
Reel/Frame 012517/0583
Assignment of Assignor's Interest
Recorded: 2002-01-14
Received: 2002-01-31
Pages: 2
Assignor
SHIOSAKI, TOYOTAKA
Executed: 2002-01-10
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Properties
(2)
Method for Monitoring the Rate of Etching of a Semiconductor
Application:
10/050,737 →
Data transmission system
Application:
10/047,283 →