IP Library Granted Patent US 6,687,014
Granted Patent Utility
US 6,687,014 · Confirmation No. 7752

METHOD FOR MONITORING THE RATE OF ETCHING OF A SEMICONDUCTOR

⬇ PDF
Code Description Pages PDF
2003-12-11 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-01-16 TRNA Transmittal of New Application 2 View
2002-01-16 SPEC Specification 14 View
2002-01-16 CLM Claims 6 View
2002-01-16 ABST Abstract 1 View
2002-01-16 DRW Drawings-only black and white line drawings 4 View
2002-01-16 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,687,014
App. No.
10/050,737
Filed
2002-01-16
Granted
2004-02-03
Pub. No.
US20030133127A1
Art Unit
2877
PTA
0 days