Granted Patent
Utility
US 6,687,014
· Confirmation No. 7752
METHOD FOR MONITORING THE RATE OF ETCHING OF A SEMICONDUCTOR
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-11 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2002-01-16 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-01-16 | SPEC |
Specification | 14 | View | |
| 2002-01-16 | CLM |
Claims | 6 | View | |
| 2002-01-16 | ABST |
Abstract | 1 | View | |
| 2002-01-16 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-01-16 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Shoaib Hasan Zaidi
Poughkeepsie, NY
Gangadhara S. Mathad
Poughkeepsie, NY
Attorneys & Agents of Record
Classification
USPC
356/504
G01B11/0683
G01B11/0675
Prosecution
- Examiner
- LYONS, MICHAEL A
- Art Unit
- 2877
- Customer No.
- 530
- Docket No.
- INTECH 3.0-020
- Confirmation No.
- 7752
Publication
- Pub. No.
- US20030133127A1
- Pub. Date
- 2003-07-17
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-03-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-16
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Quick Facts
- Patent No.
- US 6,687,014
- App. No.
- 10/050,737
- Filed
- 2002-01-16
- Granted
- 2004-02-03
- Pub. No.
- US20030133127A1
- Examiner
- LYONS, MICHAEL A
- Art Unit
- 2877
- PTA
- 0 days
External Links