Patent Assignment
Reel/Frame 012533/0552
Assignment of Assignor's Interest
Recorded: 2002-01-18
Pages: 5
Assignors
NOVAK, RICHARD
Executed: 2002-01-16
KASHKOUSH, ISMAIL
Executed: 2002-01-16
CHEN, GIM-SYANG
Executed: 2002-01-16
NEMETH, DENNIS
Executed: 2002-01-16
Assignee
AKRION, LLC
SUITE #150, 6330 HEDGEWOOD DRIVE, ALLENTOWN, PENNSYLVANIA, 18106
Covered Property
(1)
Process and apparatus for removal of photoresist from semiconductor wafers
Application:
10/053,371 →
Publication:
US 2003/0139057