Patent Application
Utility
Small
App. No. 10/053,371
· Confirmation No. 2897
Process and apparatus for removal of photoresist from semiconductor wafers
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-04-17 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-04-17 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-01-18 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-01-18 | SPEC |
Specification | 7 | View | |
| 2002-01-18 | CLM |
Claims | 3 | View | |
| 2002-01-18 | ABST |
Abstract | 1 | View | |
| 2002-01-18 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-01-18 | OATH |
Oath or Declaration filed | 7 | View |
Inventors
Richard Novak
Plymouth, MN
Gim-Syang Chen
Allentown, PA
Dennis Nemeth
Nazareth, PA
Ismail Kashkoush
Orefield, PA
Attorneys & Agents of Record
Classification
USPC
438/710
G03F7/423
Y10T117/10
Prosecution
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- Customer No.
- 26316
- Docket No.
- 108430.024
- Confirmation No.
- 2897
Publication
- Pub. No.
- US20030139057A1
- Pub. Date
- 2003-07-24
Child
is a Continuation in-part of
→
App. 10/366,054
· US 6,818,563
Filed 2003-02-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2003/001668
Filed 2003-01-20
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-18
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Quick Facts
- App. No.
- 10/053,371
- Filed
- 2002-01-18
- Pub. No.
- US20030139057A1
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
External Links