IP Library › Patent Application 10366054
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App. No. 10/366,054 · Confirmation No. 9974

PROCESS AND APPARATUS FOR REMOVAL OF PHOTORESIST FROM SEMICONDUCTOR WAFERS USING SPRAY NOZZLES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-09-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-26 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-26 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-26 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-07-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-26 FWCLM Index of Claims 1 View
2004-07-26 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-21 SRNT Examiner's search strategy and results 1 View
2004-07-13 CTEQ Ex Parte Quayle Action 5 View
2004-07-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-13 FWCLM Index of Claims 1 View
2004-07-09 SRNT Examiner's search strategy and results 1 View
2004-07-01 WFEE Fee Worksheet (SB06) 2 View
2004-06-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2004-06-22 CLM Claims 4 View
2004-06-22 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-04-23 CTNF Non-Final Rejection 6 View
2004-04-23 892 List of references cited by examiner 1 View
2004-04-23 1449 List of References cited by applicant and considered by examiner 2 View
2004-04-23 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-23 FWCLM Index of Claims 1 View
2004-04-12 SRNT Examiner's search strategy and results 1 View
2003-08-29 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-05-12 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-02-13 TRNA Transmittal of New Application 2 View
2003-02-13 SPEC Specification 8 View
2003-02-13 CLM Claims 2 View
2003-02-13 ABST Abstract 1 View
2003-02-13 DRW Drawings-only black and white line drawings 3 View
2003-02-13 OATH Oath or Declaration filed 7 View
2003-02-13 WFEE Fee Worksheet (SB06) 1 View
2003-02-13 WCLM Claims Worksheet (PTO-2022) 1 View
2003-02-13 WFEE Fee Worksheet (SB06) 1 View
2003-02-13 TRNA Transmittal of New Application 2 View
2003-02-13 SPEC Specification 8 View
2003-02-13 CLM Claims 2 View
2003-02-13 ABST Abstract 1 View
2003-02-13 DRW Drawings-only black and white line drawings 3 View
2003-02-13 OATH Oath or Declaration filed 7 View
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Quick Facts
App. No.
10/366,054
Filed
2003-02-13
Granted
2004-11-16
Pub. No.
US20030136334A1
Art Unit
2812
PTA
0 days