Patent Assignment
Reel/Frame 012564/0323
Assignment of Assignor's Interest
Recorded: 2002-02-04
Pages: 3
Assignee
CIELO COMMUNICATIONS, INC.
325 INTERLOCKEN PARKWAY, BUILDING A, BROOMFIELD, COLORADO, 80303
Covered Property
(1)
Method and Apparatus for Controlling Substrate Temperature and Layer Thickness During Film Formation
Patent:
6,679,946 →
Application:
09/967,212 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.