IP Library › Granted Patent US 6,679,946
Granted Patent Utility
US 6,679,946 · Confirmation No. 9390

METHOD AND APPARATUS FOR CONTROLLING SUBSTRATE TEMPERATURE AND LAYER THICKNESS DURING FILM FORMATION

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 Code Description Pages PDF
2003-07-14 LET. Miscellaneous Incoming Letter 2 View
2003-07-14 DRW Drawings-only black and white line drawings 8 View
2002-02-04 TRNA Transmittal of New Application 4 View
2002-02-04 DRW Drawings-only black and white line drawings 7 View
2002-02-04 OATH Oath or Declaration filed 3 View
2001-09-27 TRNA Transmittal of New Application 4 View
2001-09-27 SPEC Specification 15 View
2001-09-27 CLM Claims 7 View
2001-09-27 ABST Abstract 1 View
2001-09-27 DRW Drawings-only black and white line drawings 8 View
2001-09-27 OATH Oath or Declaration filed 3 View
2001-09-27 LET. Miscellaneous Incoming Letter 2 View
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Quick Facts
Patent No.
US 6,679,946
App. No.
09/967,212
Filed
2001-09-27
Granted
2004-01-20
Art Unit
1765
PTA
-101 days