Patent Assignment
Reel/Frame 012566/0878
Assignment of Assignor's Interest
Recorded: 2002-02-05
Pages: 2
Assignors
HIROI, TAKASHI
Executed: 2002-01-07
WATANABE, MASAHIRO
Executed: 2002-01-08
TANAKA, MAKI
Executed: 2002-01-07
KUNI, ASAHIRO
Executed: 2002-01-07
SHISHIDO, CHIE
Executed: 2002-01-08
MIYAI, HIROSHI
Executed: 2002-01-09
NARA, YASUHIKO
Executed: 2002-01-10
ISOBE, MITSUNOBU
Executed: 2002-01-08
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Its Apparatus for Inspecting a Pattern