Patent Assignment
Reel/Frame 012584/0865
Assignment of Assignor's Interest
Recorded: 2002-02-08
Received: 2002-02-21
Pages: 2
Assignee
SENSYS INSTRUMENTS CORPORATION
2090 DUANE AVENUE, SANTA CLARA, CA, 95054, UNITED STATES
Covered Property
(1)
Method of Measuring Meso-Scale Structures on Wafers
Application:
09/999,410 →