Granted Patent
Utility
US 6,623,991
· Confirmation No. 7519
METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-07-03 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-10-31 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-10-31 | SPEC |
Specification | 36 | View | |
| 2001-10-31 | CLM |
Claims | 2 | View | |
| 2001-10-31 | ABST |
Abstract | 1 | View | |
| 2001-10-31 | DRW |
Drawings-only black and white line drawings | 19 | View |
Inventors
Kenneth Johnson
Santa Clara, CA
Fred E. Stanke
Cupertino, CA
Attorneys & Agents of Record
Classification
USPC
438/7
H10P72/00
H10P74/203
G01B11/0625
G01B11/30
G01N21/211
Prosecution
- Examiner
- THOMPSON, CRAIG
- Art Unit
- 2813
- Customer No.
- 28584
- Docket No.
- 21964-720
- Confirmation No.
- 7519
Publication
- Pub. No.
- US20020090743A1
- Pub. Date
- 2002-07-11
Patent Term Adjustment
0days
Parent
is a Continuation of
→
App. 09/735,286
· US 6,340,602
Filed 2000-12-11
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/172,851
Filed 1999-12-10
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/194,651
Filed 2000-04-04
· Provisional Application Expired
Child
is a Continuation of
→
App. 10/919,718
· US 7,049,633
Filed 2004-08-17
· Patented Case
Child
is a Continuation of
→
App. 10/621,218
· US 6,806,105
Filed 2003-07-16
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-09-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-08
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Quick Facts
- Patent No.
- US 6,623,991
- App. No.
- 09/999,410
- Filed
- 2001-10-31
- Granted
- 2003-09-23
- Pub. No.
- US20020090743A1
- Examiner
- THOMPSON, CRAIG
- Art Unit
- 2813
- PTA
- 0 days
External Links