Assignment of Assignor's Interest

Recorded: 2005-09-30 Received: 2005-09-30 Pages: 3

Assignor

SENSYS INSTRUMENTS CORPORATION

Executed: 2005-09-27

Assignee

THERMA-WAVE, INC.

1250 RELIANCE WAY, FREMONT, CA, 94539, UNITED STATES

Covered Properties (10)

Method of Measuring Meso-Scale Structures on Wafers

Application: 10/919,718 →

Integrated Surface Metrology

Application: 10/654,073 →

Method of Measuring Meso-Scale Structures on Wafers

Application: 10/621,218 →

Method of Measuring Meso-Scale Structures on Wafers

Application: 09/999,410 →

Optimized Aperture Shape for Optical Cd/Profile Metrology

Application: 09/938,415 →

Small-Spot Spectrometry Instrument with Reduced Polarization

Application: 09/932,548 →

Notch and Flat Sensor for Wafer Alignment

Application: 09/932,786 →

Bathless Wafer Measurement Apparatus and Method

Application: 09/927,142 →

Optical critical dimension metrology system integrated into semiconductor wafer process tool

Application: 09/927,102 →

Method of Detecting Residue on a Polished Wafer

Application: 09/800,306 →