Granted Patent
Utility
US 6,572,456
· Confirmation No. 4016
BATHLESS WAFER MEASUREMENT APPARATUS AND METHOD
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-10 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-10 | SPEC |
Specification | 14 | View | |
| 2001-08-10 | CLM |
Claims | 4 | View | |
| 2001-08-10 | ABST |
Abstract | 1 | View | |
| 2001-08-10 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-08-10 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Michael Weber-Grabau
Sunnyvale, CA
Ivelin A. Anguelov
Sunnyvale, CA
Edric H. Tong
Sunnyvale, CA
Adam E. Norton
Palo Alto, CA
Fred E. Stanke
Cupertino, CA
Badru D. Hyatt
San Jose, CA
Attorneys & Agents of Record
Classification
USPC
451/65
B24B37/013
B24B49/02
B24B49/12
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Customer No.
- 28584
- Docket No.
- SEN-009
- Confirmation No.
- 4016
Publication
- Pub. No.
- US20020065028A1
- Pub. Date
- 2002-05-30
Patent Term Adjustment
-7days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-09-30
from
ANGUELOV, IVELIN A.,
HYATT, BADRU D.,
NORTON, ADAM E.,
STANKE, FRED E.,
TONG, EDRIC H.,
WEBER-GRABAU, MICHAEL
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-15
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Quick Facts
- Patent No.
- US 6,572,456
- App. No.
- 09/927,142
- Filed
- 2001-08-10
- Granted
- 2003-06-03
- Pub. No.
- US20020065028A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -7 days
External Links