Granted Patent
Utility
US 6,510,395
· Confirmation No. 6419
METHOD OF DETECTING RESIDUE ON A POLISHED WAFER
Inventor:
Fred E. Stanke
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-18 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2001-03-01 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-03-01 | SPEC |
Specification | 31 | View | |
| 2001-03-01 | CLM |
Claims | 6 | View | |
| 2001-03-01 | ABST |
Abstract | 1 | View | |
| 2001-03-01 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2001-03-01 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-03-01 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Fred E. Stanke
Cupertino, CA
Attorneys & Agents of Record
Classification
USPC
702/81
G01N21/9501
G01N21/31
G01N21/94
Prosecution
- Examiner
- WASHBURN, DOUGLAS N
- Art Unit
- 2863
- Customer No.
- 28584
- Docket No.
- SEN-010
- Confirmation No.
- 6419
Publication
- Pub. No.
- US20020022936A1
- Pub. Date
- 2002-02-21
Patent Term Adjustment
-57days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-09-30
from
STANKE, FRED E.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-02
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Quick Facts
- Patent No.
- US 6,510,395
- App. No.
- 09/800,306
- Filed
- 2001-03-01
- Granted
- 2003-01-21
- Pub. No.
- US20020022936A1
- Examiner
- WASHBURN, DOUGLAS N
- Art Unit
- 2863
- PTA
- -57 days
External Links