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App. No. 09/927,102 · Confirmation No. 3815

Optical critical dimension metrology system integrated into semiconductor wafer process tool

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2008-01-07 ABN Abandonment 2 View
2007-05-25 CTFR Final Rejection 6 View
2007-05-25 FWCLM Index of Claims 1 View
2007-05-25 SRFW Search information including classification, databases and other search related notes 1 View
2007-03-26 WFEE Fee Worksheet (SB06) 1 View
2007-03-26 FWCLM Index of Claims 1 View
2007-02-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2007-02-26 CLM Claims 4 View
2007-02-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-11-24 CTNF Non-Final Rejection 5 View
2006-11-24 SRFW Search information including classification, databases and other search related notes 1 View
2006-11-24 FWCLM Index of Claims 1 View
2006-11-20 SRNT Examiner's search strategy and results 2 View
2006-10-06 WFEE Fee Worksheet (SB06) 1 View
2006-10-06 FWCLM Index of Claims 1 View
2006-09-29 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2006-09-29 CLM Claims 4 View
2006-09-29 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2006-09-29 RCEX Request for Continued Examination (RCE) 1 View
2006-09-29 LET. Miscellaneous Incoming Letter 1 View
2006-06-28 CTFR Final Rejection 6 View
2006-06-28 SRFW Search information including classification, databases and other search related notes 1 View
2006-06-28 FWCLM Index of Claims 1 View
2006-04-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-04-07 CLM Claims 5 View
2006-04-07 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2006-04-07 LET. Miscellaneous Incoming Letter 1 View
2006-04-07 WFEE Fee Worksheet (SB06) 1 View
2006-04-07 WCLM Claims Worksheet (PTO-2022) 1 View
2006-03-03 PA.. Power of Attorney 1 View
2005-11-10 CTNF Non-Final Rejection 6 View
2005-11-10 892 List of references cited by examiner 1 View
2005-11-10 FWCLM Index of Claims 1 View
2005-11-10 SRFW Search information including classification, databases and other search related notes 1 View
2005-11-02 SRNT Examiner's search strategy and results 3 View
2005-09-02 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-09-02 CLM Claims 5 View
2005-09-02 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-09-02 RCEX Request for Continued Examination (RCE) 1 View
2005-09-02 LET. Miscellaneous Incoming Letter 1 View
2005-09-02 WFEE Fee Worksheet (SB06) 1 View
2005-09-02 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-03-09 CTFR Final Rejection 5 View
2005-03-09 FWCLM Index of Claims 1 View
2005-03-09 SRFW Search information including classification, databases and other search related notes 1 View
2004-12-20 WFEE Fee Worksheet (SB06) 1 View
2004-07-19 PA.. Power of Attorney 1 View
2004-05-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-05-17 CLM Claims 9 View
2004-05-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-05-17 C.AD Change of Address 1 View
2004-03-17 CTNF Non-Final Rejection 8 View
2004-03-17 892 List of references cited by examiner 1 View
2004-03-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-17 FWCLM Index of Claims 1 View
2004-01-10 WFEE Fee Worksheet (SB06) 1 View
2003-12-24 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2003-12-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-12-17 CLM Claims 8 View
2003-12-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-12-17 LET. Miscellaneous Incoming Letter 1 View
2003-10-03 CTNF Non-Final Rejection 4 View
2003-10-03 1449 List of References cited by applicant and considered by examiner 3 View
2003-10-03 892 List of references cited by examiner 1 View
2003-10-03 FWCLM Index of Claims 1 View
2003-10-03 SRFW Search information including classification, databases and other search related notes 1 View
2003-04-14 PA.. Power of Attorney 2 View
2002-07-08 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-07-08 FOR Foreign Reference 1 View
2002-07-08 FOR Foreign Reference 40 View
2002-01-16 LET. Miscellaneous Incoming Letter 1 View
2002-01-16 DRW Drawings-only black and white line drawings 3 View
2001-12-07 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2001-12-07 FOR Foreign Reference 27 View
2001-12-07 FOR Foreign Reference 30 View
2001-10-15 PEFN Pre-Exam Formalities Notice 11 View
2001-10-15 OATH Oath or Declaration filed 5 View
2001-09-28 PEFN Pre-Exam Formalities Notice 1 View
2001-08-24 A.PE Preliminary Amendment 1 View
2001-08-24 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2001-08-10 TRNA Transmittal of New Application 3 View
2001-08-10 SPEC Specification 21 View
2001-08-10 CLM Claims 9 View
2001-08-10 ABST Abstract 1 View
2001-08-10 DRW Drawings-only black and white line drawings 4 View
2001-08-10 OATH Oath or Declaration filed 4 View
2001-08-10 WFEE Fee Worksheet (SB06) 1 View
2001-08-10 WFEE Fee Worksheet (SB06) 1 View
2001-08-10 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
09/927,102
Filed
2001-08-10
Pub. No.
US20020018217A1
Art Unit
2877