Patent Assignment
Reel/Frame 012272/0020
Assignment of Assignor's Interest
Recorded: 2001-10-15
Pages: 11
Assignors
WEBER-GRABAU, MICHAEL
Executed: 2001-10-04
TONG, EDRIC H.
Executed: 2001-10-04
NORTON, ADAM E.
Executed: 2001-10-04
STANKE, FRED E.
Executed: 2001-10-04
CAHILL, JAMES M.
Executed: 2001-10-04
RUTH, DOUGLAS E.
Executed: 2001-10-04
Assignee
SENSYS INSTRUMENTS CORPORATION
2090 DUANE AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Optical critical dimension metrology system integrated into semiconductor wafer process tool
Application:
09/927,102 →
Publication:
US 2002/0018217
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 30, 2005
From: SENSYS INSTRUMENTS CORPORATION
To: THERMA-WAVE, INC.
Reel/Frame 016844/0668 →
Assignment of Assignor's Interest
Oct 7, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 016851/0953 →
Assignment of Assignor's Interest
Oct 24, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 017136/0621 →