Patent Assignment
Reel/Frame 012603/0105
Assignment of Assignor's Interest
Recorded: 2002-02-19
Received: 2002-02-27
Pages: 2
Assignee
SILICON INTEGRATED SYSTEMS CORP.
NO. 16, CREATION RD. 1, SCIENCE-BASED INDUSTRIAL PARK, HSIN CHU, TWX, TAIWAN
Covered Property
(1)
Method of Reducing Micro-Scratches During Tungsten Cmp
Application:
10/076,395 →