Granted Patent
Utility
US 6,548,409
· Confirmation No. 1381
METHOD OF REDUCING MICRO-SCRATCHES DURING TUNGSTEN CMP
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-06-03 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-06-03 | SPEC |
Specification | 5 | View | |
| 2002-06-03 | CLM |
Claims | 1 | View | |
| 2002-06-03 | ABST |
Abstract | 1 | View | |
| 2002-02-19 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-02-19 | SPEC |
Specification | 6 | View | |
| 2002-02-19 | CLM |
Claims | 2 | View | |
| 2002-02-19 | ABST |
Abstract | 1 | View | |
| 2002-02-19 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-02-19 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Shyh-Dar Lee
Hsinchu Hsien, TAIWAN
Chun-Feng Nien
Hsinchu Hsien, TAIWAN
Attorneys & Agents of Record
Classification
USPC
438/692
H10P95/062
H10W20/062
H10P52/403
Prosecution
- Examiner
- KILDAY, LISA A
- Art Unit
- 2829
- Customer No.
- 2292
- Docket No.
- 0941-0411P-SP
- Confirmation No.
- 1381
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-01-27
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-19
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Quick Facts
- Patent No.
- US 6,548,409
- App. No.
- 10/076,395
- Filed
- 2002-02-19
- Granted
- 2003-04-15
- Examiner
- KILDAY, LISA A
- Art Unit
- 2829
- PTA
- 0 days
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